Journal ArticleDOI
Ferroelectric response from lead zirconate titanate thin films prepared directly on low-resistivity copper substrates
TLDR
In this article, the authors demonstrate films of the well-known ferroelectric lead zirconate titanate (PZT) prepared directly on copper foils by chemical solution deposition (CSD).Abstract:
We demonstrate films of the well-known ferroelectric lead zirconate titanate (PZT) prepared directly on copper foils by chemical solution deposition (CSD). The films exhibit saturating polarization hysteresis, remanent polarization values of 26μC∕cm2, and permittivities of 800; these properties are comparable to those achieved using semiconductor-grade substrates. The preparation methodology is founded upon an understanding of solution chemistry as opposed to conventional gas-phase ∕ condensed-phase equilibrium approaches. By adopting this technique, base-metal compatibility can be achieved using much lower temperatures, and a broader set of devices can be prepared offering intimate contact with high conductivity, easily patternable, or ferromagnetic metals.read more
Citations
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Journal ArticleDOI
Ferroelectric thin films: Review of materials, properties, and applications
Nava Setter,Dragan Damjanovic,L. Eng,Glen R. Fox,Spartak Gevorgian,Seungbum Hong,Angus I. Kingon,Hermann Kohlstedt,N. Y. Park,G. B. Stephenson,I. Stolitchnov,A. K. Taganstev,D. V. Taylor,Tomoaki Yamada,Stephen K. Streiffer +14 more
TL;DR: An overview of the state of the art in ferroelectric thin films is presented in this paper, where the authors review applications: micro-systems' applications, applications in high frequency electronics, and memories based on Ferroelectric materials.
Journal ArticleDOI
A Thin Film Approach to Engineering Functionality into Oxides
TL;DR: In this paper, the use of reactive molecular-beam epitaxy and pulsed-laser deposition to synthesize functional oxides, including ferroelectrics, ferromagnets, and materials that are both at the same time, is described.
Journal ArticleDOI
Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting
TL;DR: In this article, the impact of composition, orientation, and microstructure on the piezoelectric properties of perovskite thin films such as PbZr1−xTixO3 (PZT) is reviewed.
Journal ArticleDOI
Processing Technologies for High Permittivity Thin Films in Capacitor Applications.
TL;DR: In this article, the authors review the current state of the art and recent advances in the processing science and technology of high-permittivity thin films with a focus on industrially scalable solution-based fabrication processes of perovskite ferroelectric systems that appear to offer the greatest promise for the fabrication of future nanoscale capacitors.
Journal ArticleDOI
Fabrication of Perovskite-Based High-Value Integrated Capacitors by Chemical Solution Deposition
TL;DR: In this article, a single-layer, 10 cm2 film with high capacitance values as high as 10 μF and layer thickness as small as 9 nm has been achieved using chemical solution deposition.
References
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Book
Thermochemical properties of inorganic substances
Ihsan Barin,Ottmar Knacke +1 more
TL;DR: In this paper, a volume of tables conveying the thermochemical parameters of more than 2000 substances, cover enthalpy, entropy, chemical potential and Planck's function, and commentaries on the chemical reactions of the relevant component and indications of stability/metastability.
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Thermodynamics in Materials Science
TL;DR: In this article, the authors explain the thermodynamics background necessary for generating accurate maps of equilibrium states to predict behavior in a wide range of materials and illustrate which maps are best suited for specific real-world scenarios and thermodynamic problems.
Journal ArticleDOI
Comments on the effects of solution precursor characteristics and thermal processing conditions on the crystallization behavior of sol-gel derived lead zirconate titanate thin films
Robert W. Schwartz,James A. Voigt,Bruce A. Tuttle,David A. Payne,T. L. Reichert,R. S. DaSalla +5 more
TL;DR: In this article, an alternative mechanism for the observed microstructural variations in films prepared from different solution precursors was discussed, and the model can be used to understand the observed effects of heating rate and thickness on the microstructure of solution-derived thin films.
Journal ArticleDOI
Dielectric properties of random and 〈100〉 oriented SrTiO3 and (Ba,Sr)TiO3 thin films fabricated on 〈100〉 nickel tapes
J. T. Dawley,P. G. Clem +1 more
TL;DR: In this paper, the authors used a chemical solution deposition approach to obtain 0.003 and 0.015 dielectric constants for BaxSr1−xTiO3 (x=0.33, 0.5, and 1.67) films with zero-field 100 kHz dielectrics ranging from 250 to 420.
Journal ArticleDOI
Copper Compatible Barium Titanate Thin Films for Embedded Passives
Jon F. Ihlefeld,Brian J. Laughlin,Alisa Hunt-Lowery,William J. Borland,Angus I. Kingon,Jon Paul Maria +5 more
TL;DR: Barium titanate thin films have been prepared by chemical solution deposition on 18 μ m thick, industry standard copper foils in the absence of chemical barrier layers as discussed by the authors, and the final embodiment exhibits randomly oriented BaTiO3 grains with diameters between 0.1 and 0.3 μ m and an equiaxed morphology.
Related Papers (5)
Lead zirconate titanate thin films directly on copper electrodes for ferroelectric, dielectric and piezoelectric applications
Dielectric properties of random and 〈100〉 oriented SrTiO3 and (Ba,Sr)TiO3 thin films fabricated on 〈100〉 nickel tapes
J. T. Dawley,P. G. Clem +1 more