Journal ArticleDOI
Formation of Several-Micrometer-Thick Polycrystalline Silicon Films on Soda Lime Glass by Flash Lamp Annealing
TLDR
In this article, the insertion of Cr thin films between glass substrates and amorphous Si (a-Si) films by catalytic chemical vapor deposition (Cat-CVD) significantly improves the adhesion of Si films to the glass substrate, resulting in uniform crystallization of a-Si in 20×20 mm2 area.Abstract:
We have succeeded in forming polycrystalline silicon (poly-Si) films with thicknesses of over 4 µm on soda lime glass by flash lamp annealing (FLA) of precursor amorphous Si (a-Si) films deposited by catalytic chemical vapor deposition (Cat-CVD). The insertion of Cr thin films between glass substrates and a-Si significantly improves the adhesion of Si films to the glass substrates, resulting in uniform crystallization of a-Si in 20×20 mm2 area. Several types of substrate, such as quartz substrates, are also used instead of soda lime glass to elucidate the effects of the properties of glass substrates on formation of the poly-Si films. a-Si films tend to be crystallized under lower irradiance than those on quartz glass substrates, which can be described by the lower thermal conductivity and the thermal diffusion length of soda lime glass. Raman spectra of the poly-Si films on soda lime glass show high crystallinity close to unity. The utilization of soda lime glass with poor thermal resistivity is of great importance for the cost-effective mass production of thin-film poly-Si solar cells.read more
Citations
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Journal ArticleDOI
Nonthermal Plasma Synthesis of Nanocrystals: Fundamental Principles, Materials, and Applications
Uwe Kortshagen,R. Mohan Sankaran,Rui N. Pereira,Rui N. Pereira,Steven L. Girshick,Jeslin J. Wu,Eray S. Aydil +6 more
TL;DR: The fundamentals of nanocrystal formation in plasmas are discussed, practical implementations of plasma reactors are reviewed, the materials that have been produced with nonthermal plAsmas and surface chemistries that have be developed are surveyed, and an overview of applications of plasma-synthesized nanocrystals is provided.
Journal ArticleDOI
Explosive crystallization of amorphous silicon films by flash lamp annealing
TL;DR: Explosive crystallization (EC) takes place during flash lamp annealing in micrometer-thick amorphous Si (a-Si) films deposited on glass substrates.
Journal ArticleDOI
A review of thermal processing in the subsecond range: semiconductors and beyond
Journal ArticleDOI
Intense pulsed light processing for photovoltaic manufacturing
TL;DR: In this article, the use of pulsed light in photovoltaic manufacturing is discussed from a photonic physics perspective, the relevant heat transfer mechanisms, as well as its impact on the major PV manufacturing sectors.
Journal ArticleDOI
Variation of crystallization mechanisms in flash-lamp-irradiated amorphous silicon films
TL;DR: In this paper, the microstructure of flash-lamp-crystallized poly-Si films is controlled by the ignition of EC at Si film edges and the homogeneous heating of interior a-Si.
References
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Journal ArticleDOI
Crystallization of amorphous-Si films by flash lamp annealing
TL;DR: In this article, a-Si films were irradiated with different energy densities and crystallized exhibiting grains with a mean size up to 6 μm, in order to reduce the strain due to the thermal gradient, samples were preheated from the backside.
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Improvement of n-Type Poly-Si Film Properties by Solid Phase Crystallization Method
TL;DR: In this article, a polycrystalline silicon (poly-Si) thin films prepared by the solid phase crystallization (SPC) method were investigated for application as photovoltaic materials.
Journal ArticleDOI
Formation of Highly Uniform Micrometer-Order-Thick Polycrystalline Silicon Films by Flash Lamp Annealing of Amorphous Silicon on Glass Substrates
TL;DR: In this paper, flash lamp annealing of amorphous silicon (a-Si) films without thermal damage onto glass substrates was used for polycrystalline silicon formation.
Journal ArticleDOI
Present status and future of crystalline silicon solar cells in Japan
TL;DR: Based on the results from crystalline Si materials and solar cells, key issues for further development of crystalline silicon materials and photovoltaic cells are discussed in this paper, together with recent progress in the field.
Journal ArticleDOI
Crystallization of Si in Millisecond Time Domain Induced by Thermal Plasma Jet Irradiation
TL;DR: In this article, the phase transformation of amorphous Si (a-Si) films has been investigated and it was found that solid phase crystallization (SPC) followed by melting and resolidification of the films have been observed.