Journal ArticleDOI
Microstereolithography of lead zirconate titanate thick film on silicon substrate
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TLDR
In this paper, the microstereolithography mSL of lead zirconate titanate PZT thick films on platinum-buffered silicon substrates is reported for the first time.Abstract:
The microstereolithography mSL of lead zirconate titanate PZT thick films on platinum-buffered silicon substrates is reported for . the first time in this paper. Crack-free PZT thick films 80-130 mm thick have been fabricated by laser direct-write UV polymerization from the HDDA-based UV curable PZT suspensions. The characterization of the fired films shows dielectric permittivities of 120-200, 2 . tangent loss of 0.92-2.5% and remnant polarization of 0.9-1.7 mCrcm . The field-induced longitudinal piezoelectric coefficient d of 33 . y3 an 84-mm thick film is 100 pCrN and the piezoelectric voltage coefficient g is about 59.5 = 10 V mrN. These results 33 demonstrated the potential for mSL of advanced piezoelectric microsensors and microactuators. q 2000 Elsevier Science B.V. All rights reserved.read more
Citations
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Journal ArticleDOI
Projection micro-stereolithography using digital micro-mirror dynamic mask
TL;DR: In this article, a high-resolution projection micro-stereolithography (PμSL) process by using the Digital Micromirror Device (DMD™, Texas Instruments) as a dynamic mask is presented.
Journal ArticleDOI
New materials for micro-scale sensors and actuators An engineering review
Stephen A. Wilson,Renaud Jourdain,Qi Zhang,Robert A. Dorey,Christopher R. Bowen,Magnus Willander,Qamar Ul Wahab,Safaa Al-Hilli,Omer Nur,Eckhard Quandt,Christer Johansson,E. Pagounis,Manfred Kohl,Jovan Matovic,Björn Samel,Wouter van der Wijngaart,Edwin Jager,Daniel O Carlsson,Zoran Djinovic,Michael Wegener,Carmen Moldovan,Rodica Iosub,E. Abad,Michael Wendlandt,Cristina Rusu,Katrin Persson +25 more
TL;DR: In this paper, a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices is provided. And a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology is presented.
Book ChapterDOI
Two-photon photopolymerization and 3D lithographic microfabrication
Hong-Bo Sun,Satoshi Kawata +1 more
TL;DR: In this article, the authors give an overview of the development and current progress of femtosecond laser micro-nanofabrication based on multiphoton absorption, and particular emphasis is placed on two-photon photopolymerization.
Journal ArticleDOI
Recent developments in the use of two-photon polymerization in precise 2D and 3D microfabrications
TL;DR: The use of two-photon polymerization (TPP) initiated by a photosensitizer's non-linear twophoton absorption in two-and three-dimensional (2D and 3D) microfabrications for various photonic applications has been intensively studied.
Journal ArticleDOI
3D printing of piezoelectric element for energy focusing and ultrasonic sensing
Zeyu Chen,Zeyu Chen,Xuan Song,Liwen Lei,Xiaoyang Chen,Chunlong Fei,Chi Tat Chiu,Xuejun Qian,Teng Ma,Yang Yang,K. Kirk Shung,Yong Chen,Qifa Zhou +12 more
TL;DR: In this article, a piezoelectric-composite slurry with BaTiO3 nanoparticles (100nm) was 3D printed using Mask-Image-Projection-based Stereolithography (MIP-SL) technology.
References
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Journal ArticleDOI
A Mechanism for Non‐Newtonian Flow in Suspensions of Rigid Spheres
Journal ArticleDOI
Freeform Fabrication of Ceramics via Stereolithography
TL;DR: In this paper, three types of materials were investigated: silica for investment casting, alumina and silicon nitride for structural parts, and three-dimensional objects were fabricated from a 0.50 volume fraction silica suspension.
Journal ArticleDOI
Micro-stereolithography of polymeric and ceramic microstructures
TL;DR: In this article, an advanced micro-stereolithography (μSL) apparatus is designed and developed which includes an Ar + laser, the beam delivery system, computer-controlled precision x-y-z stages and CAD design tool, and in situ process monitoring systems.
Proceedings ArticleDOI
Real three dimensional micro fabrication using stereo lithography and metal molding
Koji Ikuta,K. Hirowatari +1 more
TL;DR: In this article, a technique for 3D micro fabrication using stereo lithography is proposed, which is called the integrated hardened polymer stereo-lithography (IH) process and is suitable for microstructures made of both polymer and metals.
Journal ArticleDOI
Ferroelectric Thin Films in Micro-electromechanical Systems Applications
D.L. Polla,L.F. Francis +1 more
TL;DR: Ferroelectric ceramic thin films fit naturally into the burgeoning field of microelectromechanical systems (MEMS) as mentioned in this paper, which is a self-contained system of interrelated sensing and actuating devices together with signal processing and control electronics on a common substrate.