Journal ArticleDOI
Nanoflows induced by MEMS and NEMS: Limits of two-dimensional models
Alyssa T. Liem,Atakan B. Ari,Chaoyang Ti,Mark J. Cops,James G. McDaniel,Kamil L. Ekinci +5 more
- Vol. 6, Iss: 2, pp 024201
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TLDR
In this paper, the authors examined the limitations of the two-dimensional model when a substrate and axial flow are present, and the results from experiments and three-dimensional finite element models were presented to illustrate where and why the 2D flow models break down.Abstract:
The mechanical oscillations of a miniaturized resonator generate viscous oscillatory nanoflows in the surrounding fluid As a result, the fluid presents an effective added mass and damping to the resonator, which is commonly predicted by a two-dimensional flow model Here, the limitations to the two-dimensional model are examined when a substrate and axial flow are present Results from experiments and three-dimensional finite element models are presented to illustrate where and why the two-dimensional flow models break downread more
Citations
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Oscillation of cylinders of rectangular cross section immersed in fluid (vol 22, 052001, 2010)
TL;DR: In this article, the hydrodynamic load experienced by an oscillating rigid cylinder, of arbitrary rectangular cross section, that is immersed in an unbounded viscous fluid was analyzed. And the validity and accuracy of the widely used infinitely-thin blade approximation for out-of-plane motion was evaluated.
Added mass and damping of a vibrating rod in confined viscous fluids
TL;DR: In this paper, the authors proposed a method to solve the problem of the "missing link" problem........ (1, 2, 3, 4)
Journal ArticleDOI
Viscous fluid–structure interaction of micro-resonators in the beam–plate transition
TL;DR: In this paper , the authors numerically investigate the fluid-structure interaction of thin elastic cantilever micro-structures in viscous fluids and show how the displacement spectrum of the structures changes as the geometry is altered from a narrow beam to a wide plate in a liquid.
Journal ArticleDOI
A numerical method to determine the displacement spectrum of micro-plates in viscous fluids
TL;DR: In this article , a semi-numerical method for determining the dynamics of micro-resonators with finite width immersed in incompressible viscous fluids is presented, which is based on the Kirchhoff plate theory and a boundary integral formulation of the Stokes equations.
Journal ArticleDOI
Acoustic radiation of MEMS and NEMS resonators in fluids
TL;DR: In this article, the authors study the acoustic radiation generated by the vibration of miniaturized doubly clamped and cantilever beam resonators in viscous fluids and find that dissipation due to acoustic radiation is negligible when the acoustic wavelength in the fluid is much larger than the bending wavelength.
References
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Journal ArticleDOI
Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope
TL;DR: In this article, a detailed theoretical analysis of the frequency response of a cantilever beam that is immersed in a viscous fluid and excited by an arbitrary driving force is presented.
Journal ArticleDOI
The Fluid Mechanics of Microdevices—The Freeman Scholar Lecture
TL;DR: In this article, the authors review the status of the understanding of fluid flow phenomena particular to microdevices and emphasize the use of MEMS as sensors and actuators for flow diagnosis and control.
Journal ArticleDOI
Squeeze film air damping in MEMS
Minhang Bao,Heng Yang +1 more
TL;DR: In this paper, the authors present an overview and report the recent progress of research on squeeze film air damping in MEMS, including the squeezing of perforated and slotted plate, squeezing of rarefied air and squeezing of torsion mirrors.
Journal ArticleDOI
Ultrasensitive nanoelectromechanical mass detection
TL;DR: In this paper, a modulated flux of atoms was adsorbed upon the surface of a 32.8 MHz NEMS resonator within an ultrahigh-vacuum environment, and the mass-induced resonance frequency shifts by these adsorbates were then measured to ascertain a mass sensitivity of 2.53×10−18g.
Journal ArticleDOI
Boundary conditions for the numerical solution of elliptic equations in exterior regions
TL;DR: In this paper, a sequence of boundary conditions is developed which provides increasingly accurate approximations to the problem in the infinite domain and estimates of the error due to the finite boundary are obtained for several cases.
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