Nanoparticles from low-pressure, low-temperature plasmas

TLDR: In this paper, the formation of particles in low-temperature, low-pressure plasmas is discussed and various technological aspects of the formation and characterization of the powders are discussed.

Abstract: Publisher Summary This chapter shows that low-pressure, low-temperature plasmas may generate a high particle nucleation rate and that they can allow for control of the composition, size, and atomic structure of the particles. These plasmas can produce nanometric particles of different composition, size, size distribution, and microstructure, depending on the discharge conditions. Besides the plasma parameters, modulation of the discharge and control of the duration of the plasma-on time can determine particle features. Results on the formation of powders of different alloys have also been presented. The scientific context of the formation of particles in low-temperature, low-pressure plasmas is reviewed. The basic studies of particles in interstellar space, the concern of the microelectronics industry about their contamination effect, the recent interest in nanostructured ceramics, and the new field of plasma crystals are also described. The various technological aspects of the formation and characterization of the powders are discussed. Detailed reports on the strong light emission observed in silicon nanoparticles produced in an rf discharge at low pressures showed that its origin is blackbody emission. In spite of using low laser intensities, nanoparticles heat up as a result of their low efficiency for dissipating heat through conduction between particles. This effect may be, in some cases, responsible for the light emission in other nanostructured materials.