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Nanoscale space charge generation in local oxidation nanolithography

Marco Chiesa, +1 more
- 01 Jul 2010 - 
- Vol. 96, Iss: 26, pp 263112
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TLDR
In this paper, the surface potential and the space charge generated during the first stages of atomic force microscopy field-induced oxidation were measured and shown to be an intrinsic feature in local oxidation experiments.
Abstract
We have measured the surface potential and the space charge generated during the first stages of atomic force microscopy field-induced oxidation. Space charge densities are about 1017 cm−3 for oxidation times below 10 ms. In a dry atmosphere, the surface potential is negative. However, in humid air the surface potential could be either positive or negative. This effect is attributed to a screening effect of the water molecules. These results explain and support the use of local oxidation patterns as templates for building molecular architectures. They also establish the space charge build up as an intrinsic feature in local oxidation experiments.

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Advanced oxidation scanning probe lithography.

Yu Kyoung Ryu, +1 more
- 08 Mar 2017 - 
TL;DR: A balanced view of the method that introduces the key steps in its evolution, provides some detailed explanations on its fundamentals and presents current trends and applications of o-SPL is provided.
Journal ArticleDOI

Direct Mapping of Ion Diffusion Times on LiCoO2 Surfaces with Nanometer Resolution

TL;DR: In this article, the strong coupling between the molar volume and mobile ion concentration in ionicallyconductive solids is used for spatially-resolved studies of ionic transport on the polycrystalline LiCoO2 surface by timeresolved spectroscopy.
Journal ArticleDOI

Scanning probe oxidation of SiC, fabrication possibilities and kinetics considerations

TL;DR: In this article, the authors reported the results of atomic force microscopy local anodic oxidation experiments on 6H-SiC in air and found that the diminished density and the change in chemical composition of the oxide grown on SiC with respect to oxide grown under similar condition on Si caused a drop in the activation energy of oxanions diffusion within the newly formed oxide layer.
Journal ArticleDOI

Detection and stability of nanoscale space charges in local oxidation nanolithography.

TL;DR: The high stability of space charges within nanoscale silicon oxide patterns generated by atomic force microscope tip-induced local anodic oxidation of alkyl-terminated silicon supports the use of localAnodic oxidation patterns as templates for selective immobilization of cationic species.
Journal ArticleDOI

Selective growth of α-sexithiophene by using silicon oxides patterns.

TL;DR: A process for fabricating ordered organic films on large area that combines the parallel local anodic oxidation of Si/SiOx substrates with the selective arrangement of molecular ultra-thin film to produce an ultra- thin film of organic molecules that is conformal to the features of the fabricated motives.
References
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Journal ArticleDOI

Kelvin probe force microscopy

TL;DR: In this paper, the authors measured the contact potential difference between different materials using scanning force microscopy (SfM) for the first time, using images of gold, platinum, and palladium surfaces taken in air.
Journal ArticleDOI

Nanofabrication by scanning probe microscope lithography: A review

TL;DR: In this paper, the authors examined various applications of SPM in modification, deposition, removal, and manipulation of materials for nanoscale fabrication, and evaluated major techniques related to these two technologies with emphasis on their abilities, efficiencies, and reliabilities to make nanostructures.
Journal ArticleDOI

Electronic Characterization of Organic Thin Films by Kelvin Probe Force Microscopy

TL;DR: In this paper, the authors highlight the potential of Kelvin probe force microscopy (KPFM) beyond imaging to simultaneously study structural and electronic properties of functional surfaces and interfaces, which is of paramount importance since it is well established that a solid surface possesses different properties than the bulk material.
Journal ArticleDOI

Nano-chemistry and scanning probe nanolithographies

TL;DR: This tutorial review presents the most promising probe-based nanolithographies that are based on the spatial confinement of a chemical reaction within a nanometer-size region of the sample surface.
Journal ArticleDOI

Nanolithography and Nanochemistry: Probe‐Related Patterning Techniques and Chemical Modification for Nanometer‐Sized Devices

TL;DR: This Review highlights the development of various scanning probe systems and the possibilities of local oxidation methods, as well as giving an overview of state-of-the-art nanometer-sized devices, and a view of future development.
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