Journal ArticleDOI
Porosity control in metal-assisted chemical etching of degenerately doped silicon nanowires
Karthik Balasundaram,Jyothi Sadhu,Jae Cheol Shin,Bruno Azeredo,Debashis Chanda,Mohammad Malik,Keng Hsu,John A. Rogers,Placid M. Ferreira,Sanjiv Sinha,Xiuling Li +10 more
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TLDR
It is found that the porosity decreases from top to bottom along the axial direction and increases with etching time, and with a MacEtch solution that has a high [HF]:[H(2)O(2)] ratio and low temperature, it is possible to form completely solid nanowires with aspect ratios of less than approximately 10:1.Abstract:
We report the fabrication of degenerately doped silicon (Si) nanowires of different aspect ratios using a simple, low-cost and effective technique that involves metal-assisted chemical etching (MacEtch) combined with soft lithography or thermal dewetting metal patterning. We demonstrate sub-micron diameter Si nanowire arrays with aspect ratios as high as 180:1, and present the challenges in producing solid nanowires using MacEtch as the doping level increases in both p- and n-type Si. We report a systematic reduction in the porosity of these nanowires by adjusting the etching solution composition and temperature. We found that the porosity decreases from top to bottom along the axial direction and increases with etching time. With a MacEtch solution that has a high [HF]:[H2O2] ratio and low temperature, it is possible to form completely solid nanowires with aspect ratios of less than approximately 10:1. However, further etching to produce longer wires renders the top portion of the nanowires porous. (Some figures may appear in colour only in the online journal)read more
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Porous One-Dimensional Nanomaterials: Design, Fabrication and Applications in Electrochemical Energy Storage.
TL;DR: This review presents an overview of porous 1D nanostructure research, from the synthesis by bottom-up and top-down approaches with rational and controllable structures, to several important electrochemical energy storage applications including lithium-ion batteries, sodium-ion lithium-sulfur batteries, lithium-oxygen batteries and supercapacitors.
Journal ArticleDOI
Metal assisted chemical etching for high aspect ratio nanostructures: A review of characteristics and applications in photovoltaics
TL;DR: In this paper, the authors highlight the characteristics of metal assisted chemical etching of silicon (Si) including controllability of the produced sidewall roughness, the inherent high aspect ratio, the weak crystal orientation dependence, impurity doping and solution concentration dependent porosity, as well as the applicability of MacEtch to non-Si based semiconductor materials including III-V compound semiconductors.
Journal ArticleDOI
Metal-assisted chemical etching of silicon and the behavior of nanoscale silicon materials as Li-ion battery anodes
William McSweeney,William McSweeney,William McSweeney,Hugh Geaney,Hugh Geaney,Colm O'Dwyer,Colm O'Dwyer +6 more
TL;DR: In this paper, the use of silicon as an anode for Li-ion batteries is reviewed, where factors such as film thickness, doping, alloying, and their response to reversible lithiation processes are summarized and discussed with respect to battery cell performance.
Journal ArticleDOI
Decoupling Diameter and Pitch in Silicon Nanowire Arrays Made by Metal‐Assisted Chemical Etching
TL;DR: In this article, the fabrication of well-separated, narrow, and relatively smooth silicon nanowires with good periodicity is demonstrated, using non-close-packed arrays of nanospheres with precisely controlled diameters, pitch, and roughness.
Journal ArticleDOI
Fabrication of porous silicon nanowires by MACE method in HF/H2O2/AgNO3 system at room temperature
TL;DR: Experimental results indicate that porous structure can be introduced by the addition of H2O2 and the pore structure could be controlled by adjusting the concentration of H1N2, and a mechanism based on the lateral etching which is catalyzed by Ag particles under the motivation by H2 O2 reduction is proposed to explain the PSiNWs formation.
References
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Journal ArticleDOI
Enhanced thermoelectric performance of rough silicon nanowires
Allon I. Hochbaum,Renkun Chen,Raul Diaz Delgado,Wenjie Liang,Erik C. Garnett,Mark Najarian,Arun Majumdar,Arun Majumdar,Peidong Yang,Peidong Yang +9 more
TL;DR: In this article, the authors report the electrochemical synthesis of large-area, wafer-scale arrays of rough Si nanowires that are 20-300 nm in diameter.
Journal Article
Enhanced Thermoelectric Performance in Rough Silicon Nanowires
Renkun Chen,Allon I. Hochbaum,Raul Diaz Delgado,Wenjie Liang,Erik C. Garnett,Mark Najarian,Arun Majumdar,Peidong Yang +7 more
TL;DR: Electrochemical synthesis of large-area, wafer-scale arrays of rough Si nanowires that are 20–300 nm in diameter show promise as high-performance, scalable thermoelectric materials.
Journal ArticleDOI
Metal-Assisted Chemical Etching of Silicon: A Review
TL;DR: This article presents an overview of the essential aspects in the fabrication of silicon and some silicon/germanium nanostructures by metal-assisted chemical etching, and introduces templates based on nanosphere lithography, anodic aluminum oxide masks, interference lithographic, and block-copolymer masks.
Journal ArticleDOI
Metal-assisted chemical etching in HF/H2O2 produces porous silicon
Xiuling Li,Paul W. Bohn +1 more
TL;DR: In this paper, a simple and effective method is presented for producing light-emitting porous silicon (PSi) using a thin layer of Au, Pt, or Au/Pd is deposited on the (100) Si surface prior to immersion in a solution of HF and H2O2 depending on the type of metal deposited and Si doping type and doping level.
Journal ArticleDOI
Silicon nanowire radial p-n junction solar cells.
Erik C. Garnett,Peidong Yang +1 more
TL;DR: A low-temperature wafer-scale etching and thin film deposition method for fabricating silicon n-p core-shell nanowire solar cells and showed efficiencies up to nearly 0.5%, limited primarily by interfacial recombination and high series resistance.