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Metal-Assisted Chemical Etching of Silicon: A Review
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This article presents an overview of the essential aspects in the fabrication of silicon and some silicon/germanium nanostructures by metal-assisted chemical etching, and introduces templates based on nanosphere lithography, anodic aluminum oxide masks, interference lithographic, and block-copolymer masks.Abstract:
This article presents an overview of the essential aspects in the fabrication of silicon and some silicon/germanium nanostructures by metal-assisted chemical etching. First, the basic process and mechanism of metal-assisted chemical etching is introduced. Then, the various influences of the noble metal, the etchant, temperature, illumination, and intrinsic properties of the silicon substrate (e.g., orientation, doping type, doping level) are presented. The anisotropic and the isotropic etching behaviors of silicon under various conditions are presented. Template-based metal-assisted chemical etching methods are introduced, including templates based on nanosphere lithography, anodic aluminum oxide masks, interference lithography, and block-copolymer masks. The metal-assisted chemical etching of other semiconductors is also introduced. A brief introduction to the application of Si nanostructures obtained by metal-assisted chemical etching is given, demonstrating the promising potential applications of metal-assisted chemical etching. Finally, some open questions in the understanding of metal-assisted chemical etching are compiled.read more
Citations
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An 18.2%-efficient black-silicon solar cell achieved through control of carrier recombination in nanostructures
TL;DR: By identifying the regimes of junction doping concentration in which each mechanism dominates, this work was able to design and fabricate an independently confirmed 18.2%-efficient nanostructured 'black-silicon' cell that does not need the antireflection coating layer normally required to reach a comparable performance level.
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Porous One-Dimensional Nanomaterials: Design, Fabrication and Applications in Electrochemical Energy Storage.
TL;DR: This review presents an overview of porous 1D nanostructure research, from the synthesis by bottom-up and top-down approaches with rational and controllable structures, to several important electrochemical energy storage applications including lithium-ion batteries, sodium-ion lithium-sulfur batteries, lithium-oxygen batteries and supercapacitors.
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Broadband achromatic dielectric metalenses
TL;DR: This work developed a design methodology and created libraries of meta-units—building blocks of metasurfaces—with complex cross-sectional geometries to provide diverse phase dispersions (phase as a function of wavelength), which is crucial for creating broadband achromatic metalenses.
Journal ArticleDOI
Black silicon: fabrication methods, properties and solar energy applications
Xiaogang Liu,Xiaogang Liu,Paul R. Coxon,Marius Peters,Bram Hoex,Jacqueline M. Cole,Jacqueline M. Cole,Derek J. Fray +7 more
TL;DR: In this article, the use of black silicon (BSi) as an anti-reflection coating in solar cells is examined and appraised, based upon strategies towards higher efficiency renewable solar energy modules.
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Ni12P5 Nanoparticles as an Efficient Catalyst for Hydrogen Generation via Electrolysis and Photoelectrolysis
TL;DR: It is demonstrated that nickel phosphide (Ni12P5) nanoparticles have efficient and stable catalytic activity for the hydrogen evolution reaction and the power conversion efficiency of the resulting composite is larger than that of silicon nanowires decorated with platinum particles.
References
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High-performance lithium battery anodes using silicon nanowires
Candace K. Chan,Hailin Peng,Gao Liu,Kevin McIlwrath,Xiao Feng Zhang,Robert A. Huggins,Yi Cui +6 more
TL;DR: The theoretical charge capacity for silicon nanowire battery electrodes is achieved and maintained a discharge capacity close to 75% of this maximum, with little fading during cycling.
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Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species
TL;DR: The small size and capability of these semiconductor nanowires for sensitive, label-free, real-time detection of a wide range of chemical and biological species could be exploited in array-based screening and in vivo diagnostics.
Journal ArticleDOI
Ordered Metal Nanohole Arrays Made by a Two-Step Replication of Honeycomb Structures of Anodic Alumina
Hideki Masuda,Kenji Fukuda +1 more
TL;DR: A highly ordered metal nanohole array (platinum and gold) was fabricated by a two-step replication of the honeycomb structure of anodic porous alumina that showed a notable color change compared with bulk gold.
Journal ArticleDOI
Enhanced thermoelectric performance of rough silicon nanowires
Allon I. Hochbaum,Renkun Chen,Raul Diaz Delgado,Wenjie Liang,Erik C. Garnett,Mark Najarian,Arun Majumdar,Arun Majumdar,Peidong Yang,Peidong Yang +9 more
TL;DR: In this article, the authors report the electrochemical synthesis of large-area, wafer-scale arrays of rough Si nanowires that are 20-300 nm in diameter.
Journal Article
Enhanced Thermoelectric Performance in Rough Silicon Nanowires
Renkun Chen,Allon I. Hochbaum,Raul Diaz Delgado,Wenjie Liang,Erik C. Garnett,Mark Najarian,Arun Majumdar,Peidong Yang +7 more
TL;DR: Electrochemical synthesis of large-area, wafer-scale arrays of rough Si nanowires that are 20–300 nm in diameter show promise as high-performance, scalable thermoelectric materials.