Journal ArticleDOI
Terahertz time-domain spectroscopy of films fabricated from SU-8
TLDR
Terahertz time-domain spectroscopy has been used to characterise the refractive index and absorption coefficient of samples fabricated using the negative photoresist SU-8, in the frequency range 0.1-1.6 THz.Abstract:
Terahertz time-domain spectroscopy has been used to characterise the refractive index and absorption coefficient of samples fabricated using the negative photoresist SU-8, in the frequency range 0.1-1.6 THz. At a frequency of 1 THz, the corresponding dielectric constant and dielectric loss tangent are 2.9 and 6.3/spl times/10/sup -6/, respectively.read more
Citations
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Journal ArticleDOI
Terahertz Time-Domain Spectroscopy for Material Characterization
Mira Naftaly,Robert E. Miles +1 more
TL;DR: Terahertz time-domain spectroscopy is used to study properties of nonpolar amorphous materials and the results were correlated with material properties.
Journal ArticleDOI
Flexible metasurfaces and metamaterials: A review of materials and fabrication processes at micro- and nano-scales
Sumeet Walia,Charan M. Shah,Philipp Gutruf,Hussein Nili,Dibakar Roy Chowdhury,Dibakar Roy Chowdhury,Withawat Withayachumnankul,Withawat Withayachumnankul,Madhu Bhaskaran,Sharath Sriram +9 more
TL;DR: The ability to bend, stretch, and roll metamaterial devices on flexible substrates adds a new dimension to aspects of manipulating electromagnetic waves and promises a new wave of device designs and functionalities.
Journal ArticleDOI
Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS
TL;DR: In this paper, the optimization results of SU-8 under UV lithography are reported and the parameters which could have an influence on the lithography quality are chosen and optimized by a three-level, L9 orthogonal array of the Taguchi method.
Journal ArticleDOI
Multidirectional UV Lithography for Complex 3-D MEMS Structures
TL;DR: In this article, a reverse-side exposure scheme through UV-transparent substrates (e.g., glass, sapphire, or quartz) has been exploited for implementing high-aspect-ratio structures (greater than 20:1).
Journal ArticleDOI
Characterization of the polymerization of SU-8 photoresist and its applications in micro-electro-mechanical systems (MEMS)
Jian Zhang,K.L. Tan,Hao Gong +2 more
TL;DR: In this paper, the optimization results of SU-8 polymerization under near UV lithography are reported and the parameters which could have influence on the lithography quality are chosen and optimized by a three level, L9 Orthogonal Array of Taguchi Method.
References
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Journal ArticleDOI
High frequency transmission line using micromachined polymer dielectric
TL;DR: In this article, a micromachined transmission line for microwave and millimetre-wave applications has been fabricated and characterised in the 20-40 GHz range, using this topology, the direct integration of both mesa and discrete devices is possible making the line suitable for MIC and MMIC applications.
Proceedings ArticleDOI
Fabrication technologies for terahertz waveguide
TL;DR: In this paper, the relative merits of fabrication techniques for terahertz waveguide fabrication is discussed, highlighting any or weakness that is relevant to tera-hertz fabrication.