Journal ArticleDOI
Transparent conducting indium oxide thin films grown by low-temperature metal organic chemical vapor deposition
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TLDR
In this article, the effect of substrate temperature and reactor pressure on indium oxide thin film growth and structural properties in the range of 250-350°C and 5.6 × 10 − 3 ǫ cm was investigated.About:
This article is published in Thin Solid Films.The article was published on 2007-01-22. It has received 29 citations till now. The article focuses on the topics: Combustion chemical vapor deposition & Transparent conducting film.read more
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Electrical and optical properties of Al doped cadmium oxide thin films deposited by radio frequency magnetron sputtering
TL;DR: In this article, aluminum doping in CdO thin films was confirmed by X-ray photoelectron spectroscopic studies and actual doping percentages were also measured from it, and the deposited films were characterized by studying their structural, electrical and optical properties.
Journal ArticleDOI
Bandgap widening in highly conducting CdO thin film by Ti incorporation through radio frequency magnetron sputtering technique
TL;DR: In this article, transparent and highly conducting thin films of cadmium oxide (CdO) with titanium doping were synthesized by using radio frequency magnetron sputtering technique, and the thin films were deposited on glass and silicon substrates with different percentages of titanium at a fixed substrate temperature 473 K and a fixed pressure of 0.1 mbar in Ar atmosphere.
Journal ArticleDOI
Effect of substrate temperature on structural, optical and electrical properties of pulsed laser ablated nanostructured indium oxide films
D. Beena,K.J. Lethy,R. Vinodkumar,V.P. Mahadevan Pillai,V. Ganesan,Deodatta M. Phase,S. K. Sudheer +6 more
TL;DR: In this article, Nanocrystalline indium oxide (INO) films are characterized using GIXRD, XPS, AFM and UV-visible spectroscopy to study the effect of substrate temperature on the structural and optical properties of films.
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Integration of In2O3 nanoparticle based ozone sensors with GaInN∕GaN light emitting diodes
Ch. Y. Wang,V. Cimalla,Th. Kups,C.-C. Röhlig,Th. Stauden,Oliver Ambacher,Michael Kunzer,Thorsten Passow,W. Schirmacher,Wilfried Pletschen,Klaus Köhler,Joachim Wagner +11 more
TL;DR: In this article, the authors integrated ultrathin layers of In2O3 nanoparticles and a GaInN∕GaN based blue light emitting diode (LED) on a single sensor chip.
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Transparent conductive Sb-doped SnO2/Ag multilayer films fabricated by magnetron sputtering for flexible electronics
TL;DR: In this paper, the effects of an embedded silver layer and substrate temperature on the electrical and optical properties of Sb-doped SnO2 (ATO)/ silver (Ag) layered composite structures on polyethylene naphthalate substrates have been investigated.
References
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Book
Elements of X-ray diffraction
TL;DR: In this article, the authors present a chemical analysis of X-ray diffraction by Xray Spectrometry and phase-diagram Determination of single crystal structures and phase diagrams.
Journal ArticleDOI
Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings
TL;DR: Two cylindrically symmetric and complementary sputtering geometries, the post and hollow cathodes, were used to deposit thick coatings of various metals (Mo, Cr, Ti, Fe, Cu, and Al-alloy) onto glass and metallic substrates at deposition rates of 1000-2000 A/min under various conditions of substrate temperature, argon pressure, and plasma bombardment as mentioned in this paper.
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Transparent conductive electrodes for electrochromic devices: A review
TL;DR: In this article, the optical and electrical properties of thin films that are useful as transparent electrodes in electrochromic devices are discussed, and the properties of certain heavily doped widebandgap semiconductor oxides (especially In2O3:Sn) and of metal films are discussed.
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Highly sensitive ozone sensor
TL;DR: In this article, the effects of various metaloxide catalysts added to the film surface have been examined, and it was found that the Fe-oxide-added In2O3 semiconductor thin film has a high sensitivity and reliability to low concentrations of O3 below 100 ppb.
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S. Kasiviswanathan,G. Rangarajan +1 more