scispace - formally typeset
G

Gerald Lucovsky

Researcher at North Carolina State University

Publications -  324
Citations -  10085

Gerald Lucovsky is an academic researcher from North Carolina State University. The author has contributed to research in topics: Dielectric & Thin film. The author has an hindex of 50, co-authored 324 publications receiving 9826 citations. Previous affiliations of Gerald Lucovsky include University of North Carolina at Chapel Hill.

Papers
More filters
Patent

High power RF window deposition apparatus, method, and device

TL;DR: In this article, a process for forming a coating for an RF window which has improved secondary electron emission and reduced multipactor for high power RF waveguides is formed from a substrate with low loss tangent and desirable mechanical characteristics.
Journal ArticleDOI

Low‐temperature plasma‐assisted processes for fabrication of SiO2/Si heterostructures

TL;DR: In this paper, a low-temperature process for the formation of SiO2/Si structures at 200-300°C was developed to separate interface formation by plasma-associated oxidation from bulk oxide plasma-assisted deposition.
Journal ArticleDOI

Reversible metastable configurations in amorphous silicon

TL;DR: In this paper, the authors presented experimental evidence for reversible metastable alloy atom configurations in amorphous silicon, and identified reversible transitions between samples with Si-F-Si bridging configurations and samples containing only conventional silicon-fluorine bonding structures.