G
Gerald Lucovsky
Researcher at North Carolina State University
Publications - 324
Citations - 10085
Gerald Lucovsky is an academic researcher from North Carolina State University. The author has contributed to research in topics: Dielectric & Thin film. The author has an hindex of 50, co-authored 324 publications receiving 9826 citations. Previous affiliations of Gerald Lucovsky include University of North Carolina at Chapel Hill.
Papers
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Chemical bonding and electronic structure of high-κ transition metal dielectrics: applications to interfacial band offset energies and electronically active defects
Gerald Lucovsky,Jerry L. Whitten +1 more
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Degradation and SILC Effects of RPECVD sub-2.0nm Oxide/Nitride and Oxynitride Dielectrics Under Constant Current Stress
TL;DR: In this paper, the authors investigated the effect of boron penetration and nitrogen incorporation on the breakdown of p-channel devices with sub-2.0 nm Oxide/Nitride (O/N) and oxynitride dielectrics prepared by remote plasma enhanced CVD (RPECVD).
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Band-edge electronic structures, and pre-existing defects in remote plasma deposited (RPD) non-crystalline (nc-) SiO2 and GeO2
TL;DR: In this article, Zhao et al. studied remote plasma deposited (RPD) ncSiO2 and nc-GeO2 thin films and their respective interfaces with Si and Ge substrates and identified the local atomic structure and medium range order (MRO) cluster in which pre-existing defects are embedded.
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Annealing of “intrinsic” and photo-induced defects in hydrogenated amorphous silicon
TL;DR: In this paper, the authors determine the kinetics of this relaxation process in films with similar hydrogen concentrations deposited by reactive magnetron sputtering at a substrate temperature of about 40 °C, and annealed at temperatures greater than 150 °C.