G
Gerald Lucovsky
Researcher at North Carolina State University
Publications - 324
Citations - 10085
Gerald Lucovsky is an academic researcher from North Carolina State University. The author has contributed to research in topics: Dielectric & Thin film. The author has an hindex of 50, co-authored 324 publications receiving 9826 citations. Previous affiliations of Gerald Lucovsky include University of North Carolina at Chapel Hill.
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Process induced pre-existing defects in non-crystalline SiO2 and GeO2 at vacated O-atom bonding sites and comparisons with Ge-S(Se) alloy bonding sites
TL;DR: In this paper, X-ray spectroscopy (XAS) studies of remote plasma deposited (RPD) nc-SiO2 and ncGeO2 thin films and their interfaces with Si and Ge substrates are addressed.
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Electron Cycloytron Resonance Plasma Etching/Cleaning For Si Device Fabrication
Proceedings ArticleDOI
Nanoscale depth-resolved electronic properties of SiO 2 /SiO x /SiO 2 gate dielectrics for radiation-tolerant electronics
TL;DR: In this article, the authors combined nanoscale depth-resolved cathodoluminescence spectroscopy (DRCLS) and spectroscopic ellipsometry (SE) to measure the energies and depth distribution of charge traps in SiO 2 /SiO x/SiO 2 gate dielectrics for radiation tolerant electronics.
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Application of non-linear optical second harmonic generation and X-ray absorption and spectroscopies to defect related properties of Hf silicate and Hf Si oxynitride gate dielectrics
TL;DR: In this paper, three different Hf oxide based dielectrics have emerged as viable candidates for applications in advanced ULSI devices, including phase separated Hf silicates and Hf Si oxynitrides.