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Gerald Lucovsky

Researcher at North Carolina State University

Publications -  324
Citations -  10085

Gerald Lucovsky is an academic researcher from North Carolina State University. The author has contributed to research in topics: Dielectric & Thin film. The author has an hindex of 50, co-authored 324 publications receiving 9826 citations. Previous affiliations of Gerald Lucovsky include University of North Carolina at Chapel Hill.

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Remote plasma enhanced chemical vapor deposition of GaP with in situ generation of phosphine precursors

TL;DR: In this paper, thin homoepitaxial films of gallium phosphide (GaP) have been grown by remote plasma enhanced chemical vapor deposition utilizing in situ-generated phosphine precursors.
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Controlled Nitrogen Incorporation at Si-SiO2 Interfaces by Remote Plasma-Assisted Processing.

TL;DR: In this article, N-atoms have been incorporated at Si-SiO2 interfaces by forming the interface and oxide film by a 300°C remote plasma assisted nitridation/oxidation process using N2O.
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Strain-eliminating chemical bonding self-organizations within intermediate phase (IP) windows in chalcogenide, oxide and nitride non-crystalline bulk glasses and deposited thin film binary, ternary and quaternary alloys

TL;DR: In this article, Boolchand et al. identify the necessary and sufficient conditions for IP windows to open and close as a function of changes in the alloy composition, based on competitive and synergistic double percolation theory.
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Monoclinic textured HfO2 films on GeOxNy/Ge(100) stacks using interface reconstruction by controlled thermal processing

TL;DR: In this paper, the authors used x-ray absorption spectroscopy of the O K edge to investigate the nanocrystalline structure of thin HfO2 films deposited by remote plasma enhanced chemical vapor deposition on Ge(100).
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Analysis of the forgotten parts of the Ge K edge spectra: life before the EXAFS oscillations

TL;DR: The white line and X-ray absorption near edge spectroscopy (XANES) spectral regions of the Ge K edge, ∼11100 to 11112 eV, and between 11112 and 11180 eV and beyond, contain electronic structure information that complements near-neighbor bonding information in the single-scattering EXAFS regime.