An object is to provide a semiconductor device of which a manufacturing process is not complicated and by which cost can be suppressed, by forming a thin film transistor using an oxide semiconductor film typified by zinc oxide, and a manufacturing method thereof. For the semiconductor device, a gate electrode is formed over a substrate; a gate insulating film is formed covering the gate electrode; an oxide semiconductor film is formed over the gate insulating film; and a first conductive film and a second conductive film are formed over the oxide semiconductor film. The oxide semiconductor film has at least a crystallized region in a channel region.

Semiconductor device, and manufacturing method thereof

A 45 nm logic technology is described that for the first time incorporates high-k + metal gate transistors in a high volume manufacturing process. The transistors feature 1.0 nm EOT high-k gate dielectric, dual band edge workfunction metal gates and third generation strained silicon, resulting in the highest drive currents yet reported for NMOS and PMOS. The technology also features trench contact based local routing, 9 layers of copper interconnect with low-k ILD, low cost 193 nm dry patterning, and 100% Pb-free packaging. Process yield, performance and reliability are demonstrated on 153 Mb SRAM arrays with SRAM cell size of 0.346 mum2, and on multiple microprocessors.

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A 45nm Logic Technology with High-k+Metal Gate Transistors, Strained Silicon, 9 Cu Interconnect Layers, 193nm Dry Patterning, and 100% Pb-free Packaging

A 275mm2 network-on-chip architecture contains 80 tiles arranged as a 10 times 8 2D array of floating-point cores and packet-switched routers, operating at 4GHz. The 15-F04 design employs mesochronous clocking, fine-grained clock gating, dynamic sleep transistors, and body-bias techniques. The 65nm 100M transistor die is designed to achieve a peak performance of 1.0TFLOPS at 1V while dissipating 98W.

An 80-Tile 1.28TFLOPS Network-on-Chip in 65nm CMOS

A multicore processor in 65-Nm technology with 80 single-precision, floatingpoint cores delivers performance in excess of a Teraflops while consuming less than 100 W. A 2D on-die mesh interconnection network operating at 5 GHz provides the high-performance communication fabric to connect the cores. The network delivers a bisection bandwidth of 2.56 Terabits per second and a per hop fall-through latency of 1 nanosecond.

A 5-GHz Mesh Interconnect for a Teraflops Processor

This paper describes an integrated network-on-chip architecture containing 80 tiles arranged as an 8x10 2-D array of floating-point cores and packet-switched routers, both designed to operate at 4 GHz. Each tile has two pipelined single-precision floating-point multiply accumulators (FPMAC) which feature a single-cycle accumulation loop for high throughput. The on-chip 2-D mesh network provides a bisection bandwidth of 2 Terabits/s. The 15-FO4 design employs mesochronous clocking, fine-grained clock gating, dynamic sleep transistors, and body-bias techniques. In a 65-nm eight-metal CMOS process, the 275 mm2 custom design contains 100 M transistors. The fully functional first silicon achieves over 1.0 TFLOPS of performance on a range of benchmarks while dissipating 97 W at 4.27 GHz and 1.07 V supply.

An 80-Tile Sub-100-W TeraFLOPS Processor in 65-nm CMOS

A 65nm generation logic technology with 1.2nm physical gate oxide, 35nm gate length, enhanced channel strain, NiSi, 8 layers of Cu interconnect, and low-k ILD for dense high performance logic is presented. Transistor gate length is scaled down to 35nm while not scaling the gate oxide as a means to improve performance and reduce power. Increased NMOS and PMOS drive currents are achieved by enhanced channel strain and junction engineering. 193nm lithography along with APSM mask technology is used on critical layers to provide aggressive design rules and a 6-T SRAM cell size of 0.57/spl mu/m/sup 2/. Process yield, performance and reliability are demonstrated on a 70 Mbit SRAM test vehicle with >0.5 billion transistors.

A 65nm logic technology featuring 35nm gate lengths, enhanced channel strain, 8 Cu interconnect layers, low-k ILD and 0.57 /spl mu/m/sup 2/ SRAM cell

A transistor comprises a substrate, a pair of spacers on the substrate, a gate dielectric layer on the substrate and between the pair of spacers, a gate electrode layer on the gate dielectric layer and between the pair of spacers, an insulating cap layer on the gate electrode layer and between the pair of spacers, and a pair of diffusion regions adjacent to the pair of spacers The insulating cap layer forms an etch stop structure that is self aligned to the gate and prevents the contact etch from exposing the gate electrode, thereby preventing a short between the gate and contact The insulator-cap layer enables self-aligned contacts, allowing initial patterning of wider contacts that are more robust to patterning limitations

Self-aligned contacts

A 180 nm generation logic technology has been developed with high performance 140 nm L/sub GATE/ transistors, six layers of aluminum interconnects and low-/spl epsi/ SiOF dielectrics. The transistors are optimized for a reduced 1.3-1.5 V operation to provide high performance and low power. The interconnects feature high aspect ratio metal lines for low resistance and fluorine doped SiO/sub 2/ inter-level dielectrics for reduced capacitance. 16 Mbit SRAMs with a 5.59 /spl mu/m/sup 2/ 6-T cell size have been built on this technology as a yield and reliability test vehicle.

A high performance 180 nm generation logic technology

Techniques are disclosed for fabricating FinFET transistors (e.g., double-gate, trigate, etc). A sacrificial gate material (such as polysilicon or other suitable material) is deposited on fin structure, and polished to remove topography in the sacrificial gate material layer prior to gate patterning. A flat, topography-free surface (e.g., flatness of 50 nm or better, depending on size of minimum feature being formed) enables subsequent gate patterning and sacrificial gate material opening (via polishing) in a FinFET process flow. Use of the techniques described herein may manifest in structural ways. For instance, a top gate surface is relatively flat (e.g., flatness of 5 to 50 nm, depending on minimum gate height or other minimum feature size) as the gate travels over the fin. Also, a top down inspection of gate lines will generally show no or minimal line edge deviation or perturbation as the line runs over a fin.

Polish to remove topography in sacrificial gate layer prior to gate patterning

A wrap-around source/drain trench contact structure is described. A plurality of semiconductor fins extend from a semiconductor substrate. A channel region is disposed in each fin between a pair of source/drain regions. An epitaxial semiconductor layer covers the top surface and sidewall surfaces of each fin over the source/drain regions, defining high aspect ratio gaps between adjacent fins. A pair of source/drain trench contacts are electrically coupled to the epitaxial semiconductor layers. The source/drain trench contacts comprise a conformal metal layer and a fill metal. The conformal metal layer conforms to the epitaxial semiconductor layers. The fill metal comprises a plug and a barrier layer, wherein the plug fills a contact trench formed above the fins and the conformal metal layer, and the barrier layer lines the plug to prevent interdiffusion of the conformal metal layer material and plug material.

Joseph M. Steigerwald

Papers

A 65nm logic technology featuring 35nm gate lengths, enhanced channel strain, 8 Cu interconnect layers, low-k ILD and 0.57 /spl mu/m/sup 2/ SRAM cell

Self-aligned contacts

A high performance 180 nm generation logic technology

Polish to remove topography in sacrificial gate layer prior to gate patterning

Wrap-around trench contact structure and methods of fabrication