Book ChapterDOI
Current Techniques for Fabricating Microfluidic and Optofluidic Devices
Koji Sugioka,Ya Cheng +1 more
- pp 7-17
TLDR
A wide variety of techniques have been developed for fabricating microfluidic and optofluidic components and devices using polymer, glass, and silicon substrates.Abstract:
A wide variety of techniques have been developed for fabricating microfluidic and optofluidic components and devices using polymer, glass, and silicon substrates. This chapter gives a brief overview of these techniques, which can be categorized into two classes: parallel processing techniques based on photolithography and serial processing techniques based on direct writing. Some representative examples of these two categories are discussed, including photolithography on glass, soft lithography on poly(dimethylsiloxane) (PDMS), and femtosecond-laser-induced two-photon polymerization. The main advantages and disadvantages of parallel and serial processing are compared. Polymers are currently the most commonly used material for microfluidic and optofluidic applications because fabrication in polymers is easy, rapid, and cost effective. In contrast, glass offers better chemical durability and optical performance. Femtosecond laser direct writing enables microfluidic and integrated optofluidic structures with complex three-dimensional geometries to be directly embedded in glass, eliminating the need to use multistep procedures such as stacking and bonding.read more
Citations
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Micromachining a miniaturized capillary electrophoresis-based chemical analysis system on a chip
TL;DR: Micromachining technology was used to prepare chemical analysis systems on glass chips that utilize electroosmotic pumping to drive fluid flow and electrophoretic separation to distinguish sample components with no moving parts.
Proceedings ArticleDOI
Towards freeform microlens arrays for near infrared astronomical instruments
Debaditya Choudhury,Alexander Arriola,Jeremy R. Allington-Smith,Colin Cunningham,Robert R. Thomson +4 more
TL;DR: In this article, the authors demonstrate that it is possible to directly write the surface of a lenslet in three dimensions within the volume of a transparent material and then apply a natural gas flame to polish the lens surface roughness.
Dissertation
Three dimensional optofluidic devices for manipulation of particles and cells
TL;DR: The work described in this thesis details the development of three dimensional optofluidic devices that can be used for biophotonics applications, in particular for performing cell manipulation and particle separation.
References
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Journal ArticleDOI
Monolithic microfabricated valves and pumps by multilayer soft lithography
TL;DR: An extension to the soft lithography paradigm, multilayersoft lithography, with which devices consisting of multiple layers may be fabricated from soft materials is described, to build active microfluidic systems containing on-off valves, switching valves, and pumps entirely out of elastomer.
Journal ArticleDOI
Miniaturized total chemical analysis systems: A novel concept for chemical sensing
TL;DR: In this paper, a modular construction of a miniaturized "total chemical analysis system" is proposed, and theoretical performances of such systems based on flow injection analysis, chromatography and electrophoresis are compared with those of existing chemical sensors and analysis systems.
Journal ArticleDOI
Soft Lithography in Biology and Biochemistry
TL;DR: Soft lithography offers the ability to control the molecular structure of surfaces and to pattern the complex molecules relevant to biology, to fabricate channel structures appropriate for microfluidics, and topattern and manipulate cells.
Journal ArticleDOI
Finer features for functional microdevices
TL;DR: Micromachines can be created with higher resolution using two-photon absorption, and the results can be higher resolution than previously reported using single photon absorption techniques.
Journal ArticleDOI
Poly(dimethylsiloxane) as a material for fabricating microfluidic devices.
TL;DR: This Account summarizes techniques for fabrication and applications in biomedicine of microfluidic devices fabricated in poly(dimethylsiloxane) (PDMS).