Journal ArticleDOI
Development of a DVD pickup-based four-degrees- of-freedom motion error measuring system for a single-axis linear moving platform
TLDR
In this paper, a simple and high-resolution four-degrees-of-freedom (4-DOF) motion error measuring system based on DVD pickup has been proposed, which can simultaneously measure the horizontal straightness error and three angular errors of a single-axis linear moving platform.Abstract:
In this study, a simple and high-resolution four-degrees-of-freedom (4-DOF) motion error measuring system based on DVD pickup has been proposed. it can simultaneously measure the horizontal straightness error and three angular errors of a single-axis linear moving platform. The horizontal straightness error is measured based on the focus technique of DVD pickup and the inverse algorithm is used to solve pitch, yaw, and roll angular errors through the kinematic analysis. The grating is mounted on the moving axis of a single-axis linear moving platform and reflects incident laser beam into several diffractive rays. Photodiode IC (PDIC) of DVD pickup is set up for detecting the focus error signal (FES) of zero-order diffraction ray from grating and quadrant detectors are set up for detecting the position of ±1st-order diffraction rays from grating. The 4-DOF motion error measuring system detected the three angular errors with a related accuracy of about ±1 arc sec for a measuring range of ±100 arc sec, and detected horizontal straightness with a related accuracy of about ±2 μm for a measuring range of ±150 μm.read more
Citations
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Journal ArticleDOI
Drag force on an accelerating submerged plate
TL;DR: In this article, the authors measured the plate drag force as a function of time and showed that the steady phase plate drag at a depth of plate height increased by 45 % compared to the plate top at the surface.
Journal ArticleDOI
Design of a dual-axis optoelectronic level for precision angle measurements
TL;DR: In this article, the authors presented the theory and experiments of a new dual-axis optoelectronic level with low cost and high precision, which adopts a commercial DVD pickup head as the angle sensor in association with the double-layer pendulum mechanism for two-axis swings, respectively.
Journal ArticleDOI
A novel dual-axis optoelectronic level with refraction principle
TL;DR: In this article, a simple and precise optoelectronic level is proposed based on the principle of light refraction in the transparent and viscous fluid, which can be placed in any pose.
Journal ArticleDOI
Optical imaging module for astigmatic detection system.
Wei-Min Wang,Wei-Min Wang,Chung-Hsiang Cheng,Chung-Hsiang Cheng,Gabor Molnar,Ing-Shouh Hwang,Kuang-Yuh Huang,Hans-Ulrich Danzebrink,En-Te Hwu +8 more
TL;DR: An optical imaging module design for an astigmatic detection system (ADS) based on a commercial optical pickup unit (OPU) and it contains a coaxial illuminant for illuminating a specimen that has the potential to be used in high-speed atomic force microscopy.
Proceedings ArticleDOI
Development of a Dual-axis Optoelectronic Precision Level
TL;DR: In this paper, a commercially available DVD pickup head is adopted as the angle sensor in association with the double-layer pendulum mechanism for dual-axis swings, and measured angles of both axes are processed by a microprocessor and displayed on a LCD or exported to an external PC.
References
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TL;DR: In this article, the main drivers, developments and future requirements in the field of micromanufacturing as related to the machining process from the perspective of the recent research and development literature are reviewed.
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Recent advances in displacement measuring interferometry
TL;DR: In this article, the state of the art in high-resolution displacement measuring interferometry is reviewed, and several approaches to improve this situation are described, including multi-wavelength inter-ferometry.
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High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics
TL;DR: In this paper, an advanced displacement measuring interferometer system was developed to satisfy the needs of semiconductor manufacturing and lithography, which provides position resolution of 0.31 nm at velocities up to 2.1 m when the system is used with a double-pass inter-ferometer.
Journal ArticleDOI
Development of a low-cost autofocusing probe for profile measurement
TL;DR: In this article, a low-cost and precision autofocus laser probe system was developed, which can detect the focus error signal (FES) of the object with a built-in four-quadrant photodiode.
Journal ArticleDOI
A 6-degree-of-freedom measurement system for the accuracy of X-Y stages
Kuang-Chao Fan,Mu-Jung Chen +1 more
TL;DR: In this paper, a precision 6-degree-of-freedom measurement system was developed for simultaneous on-line measurements of six motion errors of an X-Y stage, which employs four laser Doppler scales and two quadrant photo detectors to detect the positions and the rotations of an optical reflection device mounted on the top of the XY stage.