Journal ArticleDOI
Development of Si Neural Probe with Microfluidic Channel Fabricated Using Wafer Direct Bonding
S. Kanno,Risato Kobayashi,Lee Sanghoon,Bea Jicheol,Takafumi Fukushima,Kazuhiro Sakamoto,Norihiro Katayama,Hajime Mushiake,Tetsu Tanaka,Mitsumasa Koyanagi +9 more
TLDR
In this paper, a Si neural probe with a microfluidic channel to deliver drugs into neural tissue was presented. But the Si probe had sufficient bonding strength to eject liquid.Abstract:
This paper reports the development of a novel Si neural probe with a microfluidic channel to deliver drugs into neural tissue. We fabricated this Si neural probe using wafer direct bonding. To confirm the fluidic capability of the fabricated Si probe, we demonstrated the ejection of liquid from the microfluidic channel using a syringe pump. We confirmed that the Si probe had sufficient bonding strength to eject liquid. In addition, we investigated the pressure drops in the microfluidic channel. From the results, we observed a linear relationship between the flow rate and the pressure drop. Since this result agreed well with the calculated values, we confirmed that the microfluidic channel was successfully formed by wafer direct bonding.read more
Citations
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Journal ArticleDOI
The NeuroMedicator?a micropump integrated with silicon microprobes for drug delivery in neural research
TL;DR: The NeuroMedicator is a micropump integrated with application-specific silicon microprobes aimed for drug delivery in neural research with small animals and leakage within the first three days after implantation is calculated to be equivalent to 0.06 µL of drug solution.
Journal ArticleDOI
Recent Progress on Non-Conventional Microfabricated Probes for the Chronic Recording of Cortical Neural Activity
TL;DR: Recent progress with reference to the many different types of non-conventional probes featuring unique characteristics in their designs, materials, and fabrication methods is reviewed while highlighting the challenges to be addressed and the microfabrication techniques necessary to implement such features.
Proceedings ArticleDOI
Multiple optical stimulation to neuron using Si opto-neural probe with multiple optical waveguides and metal-cover for optogenetics
S. Kanno,Sang Hern Lee,T. Harashima,Toshinobu Kuki,Hisashi Kino,Hajime Mushiake,H. Yao,Tetsu Tanaka +7 more
TL;DR: From in vivo experiments, the Si opto-neural probe with multiple optical waveguides and metal-cover is one of the most versatile tools for optogenetics and confirmed that light induced membrane current sink in locally stimulated area.
Proceedings ArticleDOI
Development of Si neural probe with optical waveguide for highly accurate optical stimulation of neuron
TL;DR: A novel Si neural probe with micromachined optical waveguide is proposed for multiple and precise optical stimulations of neurons and successfully observed increases of firing rates in neurons accordingly with the light exposure.
Journal ArticleDOI
Emerging Roles of Microfluidics in Brain Research: From Cerebral Fluids Manipulation to Brain-on-a-Chip and Neuroelectronic Devices Engineering.
TL;DR: This review starts with a critical discussion of the current understanding of several key topics in brain research such as neurovascular coupling, glymphatic pathway, and GBA and interrogates a wide range of microfluidic-based approaches that have been developed or can be improved to advance the fundamental understanding of brain functions.
References
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Journal ArticleDOI
A silicon-based, three-dimensional neural interface: manufacturing processes for an intracortical electrode array
TL;DR: A method is described for the manufacture of a three-dimensional electrode array geometry for chronic intracortical stimulation that consists of a 4.2*4.
Journal ArticleDOI
Performance of planar multisite microprobes in recording extracellular single-unit intracortical activity
TL;DR: The results suggest that the microprobes used to record spontaneous single-unit activity from rat cerebral cortex can be used to detect the cell position in tissue and observe events such as the propagation of electrical activity from the soma to the dendritic tree.
Journal ArticleDOI
Microfabrication techniques for integrated sensors and microsystems
Kensall D. Wise,Khalil Najafi +1 more
TL;DR: Integrated sensors and actuators are rapidly evolving to provide an important link between very large scale integrated circuits and nonelectronic monitoring and control applications ranging from biomedicine to automated manufacturing.
Journal ArticleDOI
A multichannel neural probe for selective chemical delivery at the cellular level
TL;DR: A bulk-micromachined multichannel silicon probe capable of selectively delivering chemicals at the cellular level as well as electrically recording from and stimulating neurons in vivo has been developed and a shutter is proposed for chronic use.
Journal ArticleDOI
Prolog to Wafer Direct Bonding: From Advance Substrate Engineering to Future Applications in Micro/Nanoelectronics
TL;DR: In this article, the authors describe the prerequisites for the wafer-bonding process to occur and the methods to prepare the suitable surfaces for wafer bonding, and the characterization techniques to assess the quality of the bonded interfaces and to measure the bonding energy are presented.