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Dynamical x‐ray diffraction from nonuniform crystalline films: Application to x‐ray rocking curve analysis

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TLDR
In this paper, a dynamical model for the general case of Bragg x-ray diffraction from arbitrarily thick nonuniform crystalline films is presented, incorporating depth-dependent strain and a spherically symmetric Gaussian distribution of randomly displaced atoms and can be applied to the rocking curve analysis of ion-damaged single crystals and strained layer superlattices.
Abstract
A dynamical model for the general case of Bragg x-ray diffraction from arbitrarily thick nonuniform crystalline films is presented. The model incorporates depth-dependent strain and a spherically symmetric Gaussian distribution of randomly displaced atoms and can be applied to the rocking curve analysis of ion-damaged single crystals and strained layer superlattices. The analysis of x-ray rocking curves using this model provides detailed strain and damage depth distributions for ion-implanted or MeV-ion-bombarded crystals and layer thickness, and lattice strain distributions for epitaxial layers and superlattices. The computation time using the dynamical model is comparable to that using a kinematical model. We also present detailed strain and damage depth distributions in MeV-ion-bombarded GaAs(100) crystals. The perpendicular strain at the sample surface, measured as a function of ion-beam dose (D), nuclear stopping power (Sn), and electronic stopping power (Se) is shown to vary according to (1–kSe)DSn and saturate at high doses.

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Downloaded 16 Dec 2005 to 131.215.225.9. Redistribution subject to AIP license or copyright, see http://jap.aip.org/jap/copyright.jsp

Downloaded 16 Dec 2005 to 131.215.225.9. Redistribution subject to AIP license or copyright, see http://jap.aip.org/jap/copyright.jsp

Downloaded 16 Dec 2005 to 131.215.225.9. Redistribution subject to AIP license or copyright, see http://jap.aip.org/jap/copyright.jsp

Downloaded 16 Dec 2005 to 131.215.225.9. Redistribution subject to AIP license or copyright, see http://jap.aip.org/jap/copyright.jsp
Citations
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Journal ArticleDOI

Ultrafast X-ray absorption spectroscopy

TL;DR: Ultrafast x-ray techniques using diffraction and absorption are discussed with an emphasis on the absorption techniques, and sources and detectors for use in x-rays absorption spectroscopy are reviewed.
Journal ArticleDOI

Defects production and annealing in self‐implanted Si

TL;DR: In this paper, 2.230-keV 28Si ions were implanted into Si(100) at room temperature with doses from 1014 to 1015/cm2, and they were analyzed by x-ray double crystal diffractometry and 2-MeV 4He ion channeling spectrometry.
Journal ArticleDOI

Ultrafast Time-Resolved Transient Structures of Solids and Liquids Studied by Means of X-ray Diffraction and EXAFS

TL;DR: In this article, the authors discuss a few of the vast number of possible time-resolved structure studies in solids and fluids and discuss their application to ultrafast X-ray diffraction in crystals and EXAFS in liquids.
Journal ArticleDOI

Phonon shifts in ion bombarded GaAs: Raman measurements

TL;DR: In this article, the authors measured the shits and line widths of the optic phonons of single crystal GaAs (111, (100), and (110) faces, and concluded that the strains and a change in the ionic plasma frequency due to a ratio of interstitials or antisites to atoms in the crystals of ≈ 2% − 3% account for the major portion of the phonon shifts.
References
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Book

Theory of X-Ray Diffraction in Crystals

TL;DR: A classie work, so thoroughly revised as to be essentially a new book as mentioned in this paper, has been published, which includes: a new mineral classification; a new elastic series of classification numbers for species; new data derived from x-ray crystallography, and a new form of presentation of crystallographic data; revision of specific gravities, based on new observations; introduction of the optical characters of the opaque minerals; new chemical treatment of species.
Journal ArticleDOI

Dynamical theory of diffraction applicable to crystals with any kind of small distortion

S. Takagi
TL;DR: A new development extending dynamical theory to include any small distortion inside the crystal is outlined by Takagi as discussed by the authors, which is known as dynamical perturbation theory (DTP).
Journal ArticleDOI

X‐ray rocking curve analysis of superlattices

TL;DR: In this article, the authors measured depth profiles of structure factor, and profiles of perpendicular and parallel strains relative to the underlying substrate, and derived an expression relating the structure of the rocking curve to the structural structure of superlattices.
Journal ArticleDOI

The interpretation of X-ray rocking curves from III–V semiconductor device structures

TL;DR: In this paper, the authors used a recently developed computational method to calculate X-ray double crystal rocking curves from hetero-epitaxial layers and compared these with experimental curves whenever possible.
Journal ArticleDOI

Kinematical x‐ray diffraction in nonuniform crystalline films: Strain and damage distributions in ion‐implanted garnets

TL;DR: In this paper, a kinematical model for general Bragg case x-ray diffraction in nonuniform films is presented, which incorporates depthdependent strain and spherically symmetric Gaussian distribution of randomly displaced atoms.
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