Journal ArticleDOI
Fundamental studies of Au contacts in MEMS RF switches
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In this article, the effects of contact force and electric current on contact resistance (R), microadhesion, and reliability/durability of hot-switched gold (Au) contacts were conducted using a micro/nanoadhesion apparatus as a switch simulator.Abstract:
Microelectromechanical systems (MEMS) radio frequency (RF) switches hold great promise in a myriad of commercial, aerospace, and military applications. However, there is little understanding of the factors determining the performance and reliability of these devices. Fundamental studies of hot-switched gold (Au) contacts were conducted using a micro/nanoadhesion apparatus as a switch simulator. Experiments were conducted in a well defined air environment under precisely controlled operating conditions. Fundamental properties were connected to performance with an emphasis on the effects of contact force and electric current on contact resistance (R), microadhesion, and reliability/durability. Electric current had the most profound effect on switch performance. Observations at low current (1–10 μA) include: (1) slightly higher R; (2) asperity creep; (3) high adhesion after rapid switching; (4) switch bouncing; and (5) reasonable durability. Conversely, observations at high current (1–10 mA) include: (1) slightly lower R; (2) melting; (3) no measurable adhesion; (4) less propensity for switch bouncing; (5) necking of contacts; and (6) poor reliability and durability due to switch shorting. Low current behavior was dominated by the propensity to form smooth surface contacts by hammering, which led to high van der Waals force. High current behavior was dominated by the formation of Au nanowires that bridge the contact during separation. Data suggest the presence of an adventitious film containing carbon and oxygen. Aging of the contacts in air was found to reduce adhesion.read more
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Proceedings ArticleDOI
A robust and reliable RF-MEMS switch fabricated thanks to an original dielectric free design and an innovative process flow
TL;DR: In this paper, a novel electrostatically-actuated MEMS switch is presented, which integrates a dielectric free actuator and a symmetrical stacking of the silicon nitride suspended bridge.
Proceedings ArticleDOI
Improvement of hot switching lifetime in MEMS DC switches using a drain voltage-sustaining capacitor
TL;DR: In this paper, a drain voltage-sustaining capacitor is introduced to eliminate the electric potential difference between the suspended beam and the drain electrode at the switch "opening" instant.
Proceedings ArticleDOI
A New Automated Test Equipment for Measuring Electrical Contact Resistance of Real Size Rivets
TL;DR: In this article, an automated test equipment and a test method have been described that make it possible to measure the electrical contact resistance of many real size rivet-type contacts with shank diameters 1~4mm at small contact loads with high efficiency.
Journal ArticleDOI
Effects of alloying and local order in AuNi contacts for Ohmic radio frequency micro electro mechanical systems switches via multi-scale simulation
TL;DR: In this article, the authors simulate the actuation of an Ohmic radio frequency micro electro mechanical system switch by using a multi-scale method to model a current-carrying asperity in contact with a polycrystalline substrate.
References
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RF-MEMS switches for reconfigurable integrated circuits
TL;DR: In this article, the electrostatic microswitch is used in a number of existing circuits and systems, including radio front-ends, capacitor banks, and time-delay networks, for quasi-optical beam steering and electrically reconfigurable antennas.
Journal ArticleDOI
RF MEMS from a device perspective
TL;DR: The recent progress in MEMS for radio frequency (RF) applications from a device perspective is reviewed in this article, where switches and relays, tunable capacitors, integrated inductors, mechanical resonators and filters, and some representative microwave and millimetre-wave components are discussed.
Journal ArticleDOI
Micromachined devices for wireless communications
TL;DR: An overview of recent progress in the development of micromachined devices for use in wireless communication subsystems is presented in this article, where specific applications are reviewed for each of these components with emphasis on methods for miniaturization and performance enhancement of existing and further wireless transceivers.