Journal ArticleDOI
Generalized phase-shifting interferometry
Guanming Lai,Toyohiko Yatagai +1 more
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TLDR
In this paper, a generalized phase-shifting interferometry for which the reference phases are directly evaluated at each time that the interference fringe data are read is described. But the reference phase evaluation is not considered in this paper.Abstract:
We describe a generalized phase-shifting interferometry for which the reference phases are directly evaluated at each time that the interference fringe data are read. The reference phases are obtained from the additional straight fringes on the interfering plane by the fast-Fourier-transform method. According to error estimation, the repeatabilities in the measurements of optical surfaces are λ/500 rms, when the generalized algorithm with eight data acquisitions is used.read more
Citations
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Journal Article
Digital wavefront measuring interferometer for testing optical surfaces and lenses
TL;DR: In this article, a self-scanned 1024 element photodiode array and a minicomputer are used to measure the phase (wavefront) in the interference pattern of an interferometer to lambda/100.
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Complex-wave retrieval from a single off-axis hologram.
TL;DR: A new digital two-step reconstruction method for off-axis holograms recorded on a CCD camera that is sufficiently general to be applied to sophisticated optical setups that include a microscope objective.
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Phase-evaluation methods in whole-field optical measurement techniques
TL;DR: The phase-evaluation methods as discussed by the authors use a combination of phase-shifted intensity values, provided by the modulation of one or several fringe patterns, to calculate the principal value of the optical phase.
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Microscopic fringe projection profilometry: A review
TL;DR: An overview of these state-of-the-art MFPP works is presented by analyzing and comparing the measurement principles, systems structures, and key performance indexes such as the accuracy, field of view (FOV), and speed.
Journal ArticleDOI
Phase-shift extraction and wave-front reconstruction in phase-shifting interferometry with arbitrary phase steps.
TL;DR: A new approach to reconstructing the object wave front in phase-shifting interferometry with arbitrary unknown phase steps is proposed, capable of retrieving the original object field, including its amplitude and phase distributions simultaneously, with arbitrary and unequal phase steps in a three- or four-frame method.
References
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Journal Article
Digital wavefront measuring interferometer for testing optical surfaces and lenses
TL;DR: In this article, a self-scanned 1024 element photodiode array and a minicomputer are used to measure the phase (wavefront) in the interference pattern of an interferometer to lambda/100.
Journal ArticleDOI
Digital Wavefront Measuring Interferometer for Testing Optical Surfaces and Lenses
TL;DR: The system has been designed to optimize the collection of data to give higher than usual accuracy in measuring the individual elements and final performance of assembled diffraction limited optical systems, and furthermore, the short loop time of a few minutes makes the system an attractive alternative to constraints imposed by test glasses in the optical shop.
Journal ArticleDOI
Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm.
TL;DR: La difference de phase entre les 2 faisceaux interferant varie de maniere connue et on fait des mesures de the distribution d'intensite a travers la pupille correspondant a au moins 3 dephasages differents.
Journal ArticleDOI
Generalized Data Reduction For Heterodyne Interferometry
TL;DR: A generalized algorithm for use with digital heterodyne or fringe- scanning interferometers was developed that removes many of the restrictions that had previously applied to the data collection scheme.
Journal ArticleDOI
Phase shifter calibration in phase-shifting interferometry.
Yeou-Yen Cheng,James C. Wyant +1 more
TL;DR: This paper describes some practical methods to calibrate the phase shifter in phase-shifting interferometry (PSI) using a piezoelectric transducer that has a nonlinearity of <1%.