Journal ArticleDOI
Giant Blistering of Nanometer-Thick Al2O3/ZnO Films Grown by Atomic Layer Deposition: Mechanism and Potential Applications
TLDR
The elastic blistering and the recoverable swelling of the nanometer-thick films represent a miniaturized event-driven mechanical system for potential functioning applications.Abstract:
Giant circular blisters of up to 300 μm diameter and 10 μm deflection have been produced on nanometer-thick Al2O3-on-ZnO stacks grown by atomic layer deposition at 150 °C followed by annealing at elevated temperatures. Their shape changes upon varied ambient pressures provide evidence that their formation is related to an anneal-induced outgassing combined with their impermeability. The former mainly occurs in the bottom ZnO layer that recrystallizes and releases residual hydroxide ions at elevated temperatures while the latter is dominantly contributed by the pinhole-free Al2O3 layer on top. Vibrations at a resonant frequency of ∼740 kHz are mechanically actuated and optically probed from an individual blister. By modulating the thickness and stacking sequence of Al2O3 and ZnO, we further demonstrate a localized circular film swelling upon electron-beam irradiation and its recovery after reducing the irradiation flux. The elastic blistering and the recoverable swelling of the nanometer-thick films repres...read more
Citations
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Journal ArticleDOI
A novel γ-Al2O3 nanofiltration membrane via introducing hollow microspheres into interlayers for improving water permeability
TL;DR: In this article, a high-flux α-Al 2 O 3 hollow fiber microfiltration (MF) membrane with mesoporous shell structures was constructed by self-assembled microspheres (SAMs) mixture and boehmite sol.
Journal ArticleDOI
Influence of growth temperature on dielectric strength of Al2O3 thin films prepared via atomic layer deposition at low temperature
TL;DR: In this paper , the authors examined the growth characteristics and dielectric strength of ALD Al2O3 films grown at low temperatures (≤ 150 °C) for potential application in flexible electronic devices.
Journal ArticleDOI
Enhancement in the transient visible light anisotropic photoresponse of cobalt-incorporated tungsten diselenide ternary alloy
Jolly Joy,Salil Nair,Vijay Dixit,Chaitanya Limberkar,K. D. Patel,Gunvant K. Solanki,Vivek M. Pathak +6 more
Book ChapterDOI
MoS 2 - and MoO 3 -Based Ultrathin Layered Materials for Optoelectronic Applications
TL;DR: In this paper, the synthesis of semiconducting MoS2-and MoO3-based 2D materials is discussed, addressing their fabrication issues in recent bottom-up deposition techniques and/or post-deposition exfoliation processes.
Journal ArticleDOI
On Functional Boron Nitride: Electronic Structures and Thermal Properties
TL;DR: In this paper , the basic structural, electronic, and thermal transport properties of boron nitride, especially hexagonal BN both in bulk and reduced dimensionalities, are reviewed and a thorough account of progress in atomic layer deposition (ALD) of BN, which has the advantages of being able to grow on 3D surface and control the film thickness in atomic level.
References
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Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
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Journal ArticleDOI
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