Proceedings ArticleDOI
Integrated force arrays
Stephen M. Bobbio,M.D. Kellam,B.W. Dudley,Scott H. Goodwin-Johansson,S.K. Jones,J.D. Jacobson,Farid M. Tranjan,T.D. DuBois +7 more
- pp 149-154
TLDR
Integrated force arrays (IFAs) as mentioned in this paper are flexible metallized membranes that can be patterned using the techniques of VLSI electronics and undergo substantial deformation when voltage is applied.Abstract:
Integrated force arrays (IFAs), which are flexible metallized membranes that can be patterned using the techniques of VLSI electronics and that undergo substantial deformation when voltage is applied, have been developed. They may be configured as macroscopic actuators or used in highly articulated systems of great complexity. The theory of operation, the methods of construction, and the observational results for IFA test structures are presented. >read more
Citations
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Patent
Electroactive polymer electrodes
TL;DR: In this paper, the authors proposed a method for fabricating electromechanical devices including one or more electroactive polymers and compliant electrodes that conform to the shape of a polymer.
Journal ArticleDOI
High-field deformation of elastomeric dielectrics for actuators
TL;DR: In this article, a nonlinear, high-strain, Mooney-Rivlin model was used to determine the expected strain response for a given applied field pressure, and it was determined that the electrostatic forces between the free charges on the electrodes are responsible for the observed response.
Patent
Electroactive polymer devices
Ron Pelrine,Roy D. Kornbluh +1 more
TL;DR: In this article, the authors present methods for fabricating electromechanical devices including one or more electroactive polymers, and compliant electrodes that conform to the shape of a polymer included in a transducer.
Journal ArticleDOI
Fabrication and operation of polyimide bimorph actuators for a ciliary motion system
TL;DR: In this article, a bimorph thermal actuator using two types of polyimides with different thermal expansion coefficients and a metallic microheater in between them was fabricated, and the cantilever-shaped actuator curled up from the substrate owing to the residual stress in polyimide which built up during the cooling process after they were cured at 350 degrees C.
Patent
Electroactive polymer devices for moving fluid
Ronald E. Pelrine,Roy D. Kornbluh,Scott E. Stanford,Qibing Pei,Richard Heydt,Joseph S. Eckerle,Jonathan R. Heim +6 more
TL;DR: In this paper, the authors describe devices for performing thermodynamic work on a fluid, such as pumps, compressors and fans, which may be used to provide a driving force for moving the fluid.
References
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Journal ArticleDOI
Silicon micromechanics: sensors and actuators on a chip
TL;DR: In this article, the techniques used to fabricate micromechanical structures are described and the mechanical properties of silicon, which are important to these applications, are examined, including accelerometers, resonant microsensors, motors and pumps made by these techniques.
Journal Article
Silicon micromechanics : sensors and actuators on a chip
TL;DR: In this article, the techniques used to fabricate micromechanical structures are described and the mechanical properties of silicon, which are important to these applications, are examined, including accelerometers, resonant microsensors, motors and pumps made by these techniques.
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