Journal ArticleDOI
Integrated On-Chip Inductors With Magnetic Films
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TLDR
In this article, two levels of magnetic material with high-temperature and long annealing-time stability, high saturation magnetization, low magnetostriction, high resistivity, minimal hysteretic loss, and compatibility with Si technology were used in combination with magnetic vias and elongated structures that take advantage of the uniaxial magnetic anisotropy.Abstract:
On-chip inductors with 2 levels of magnetic material were integrated into an advanced 130-nm CMOS process to obtain over an order of magnitude increase in inductance (19times) and Q-factor (16times), significantly greater than prior values of les2.3times for high frequency inductors. The magnetic material enhances inductance at frequencies up to 9.8 GHz. Measurements and models of the permeability from amorphous CoZrTa alloy demonstrate that the skin effect and eddy current dampening become important. Two levels of magnetic material with high-temperature and long annealing-time stability, high saturation magnetization, low magnetostriction, high resistivity, minimal hysteretic loss, and compatibility with Si technology were used in combination with magnetic vias and elongated structures that take advantage of the uniaxial magnetic anisotropyread more
Citations
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Journal ArticleDOI
Design Techniques for Fully Integrated Switched-Capacitor DC-DC Converters
TL;DR: Circuit design methods are proposed to enable simplified gate drivers while supporting multiple topologies (and hence output voltages) and verified by a proof-of-concept converter prototype implemented in 0.374 mm2 of a 32 nm SOI process.
Journal ArticleDOI
Review of On-Chip Inductor Structures With Magnetic Films
TL;DR: A comparison of on-chip inductors with magnetic materials from previous studies is presented and examined in this article, where the inductors use copper metallization and amorphous Co-Zr-Ta magnetic material.
Journal ArticleDOI
Progress in magnetic domain observation by advanced magneto-optical microscopy
TL;DR: The magneto-optical microscopy has gained increased attention due to the possibility to visualize field and current induced phenomena in nanostructured magnetic materials on fast time-scales as discussed by the authors.
Journal ArticleDOI
Integrated on-chip inductors using magnetic material (invited)
Donald S. Gardner,Gerhard Schrom,Peter Hazucha,Fabrice Paillet,Tanay Karnik,Shekhar Borkar,Roy Hallstein,Tony Dambrauskas,Charles Hill,Clark Linde,Wojciech Worwag,Robert Baresel,Sriram Muthukumar +12 more
TL;DR: In this article, the effects of increasing the magnetic thickness on the permeability spectra were measured and modeled, and the effect of magnetic vias and elongated structures on the inductors were examined.
Journal ArticleDOI
Tuning the permeability of permalloy films for on-chip inductor applications
TL;DR: In this article, the authors demonstrate that the permeability of 1 1/2μm thick NiFe/Cr multilayer films can be tuned by varying the thickness of individual NiFe layers while keeping the total multi-layer film thickness constant.
References
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Journal ArticleDOI
Simple accurate expressions for planar spiral inductances
TL;DR: In this paper, the authors present simple and accurate expressions for the DC inductance of square, hexagonal, octagonal, and circular spiral inductors, and evaluate the accuracy of their expressions, as well as several previously published inductance expressions, in two ways: by comparison with three-dimensional field solver predictions and by contrast with their own measurements, and also previously published measurements.
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Microfabrication and characteristics of magnetic thin-film inductors in the ultrahigh frequency region
Masahiro Yamaguchi,K. Suezawa,Ken Ichi Arai,Yukio Takahashi,Shinki Kikuchi,Yutaka Shimada,Weidong Li,S. Tanabe,K. Ito +8 more
TL;DR: In this paper, a thin-film inductor for 1 GHz-drive mobile communication handset application has been demonstrated in a 370 μm×370 μm square four turn spiral of line/space with 0.1-μm-thick slitted Fe61Al13O26 film with Cr underlayer.
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Sandwich-type ferromagnetic RF integrated inductor
TL;DR: In this article, the first demonstration of a sandwich-type ferromagnetic RF integrated spiral inductor for the 2 GHz range is reported, and the inductance L of 7.9 nH and the qualify factor Q of 12.7 were obtained for a 200 /spl mu/m/spl times/400 /splmu/m size four-turn rectangular spiral at f=2 GHz.
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Batch-fabricated microinductors with electroplated magnetically anisotropic and laminated alloy cores
TL;DR: In this paper, three different geometries of inductors, each possessing two different core materials [permalloy (NiFe) and supermalloy(NiFeMo)] are presented.
Journal ArticleDOI
High Frequency Initial Permeability Of NiFe and FeAIN
TL;DR: In this paper, the initial permeability of NiFe single layer films and single and multi-layer FeAlN films up to 500 MHz was measured using the Landau-Lifshitz/Gilbert model for phenomenological damping.