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MEMS Reliability Assurance Guidelines for Space Applications
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In this paper, a reference for understanding the various aspects of microelectromechanical systems, or MEMS, with an emphasis on device reliability is provided, including material properties, failure mechanisms, processing techniques, device structures, and packaging techniques common to MEMS.Abstract:
This guide is a reference for understanding the various aspects of microelectromechanical systems, or MEMS, with an emphasis on device reliability. Material properties, failure mechanisms, processing techniques, device structures, and packaging techniques common to MEMS are addressed in detail. Design and qualification methodologies provide the reader with the means to develop suitable qualification plans for the insertion of MEMS into the space environment.read more
Citations
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Proceedings ArticleDOI
The integration metrology analysis tools of MEMS multi-bonding interface inspection solution
Chun-An Huang,S. K. Fang,Kim Hsu +2 more
TL;DR: In this paper, the authors demonstrate integration non-destructive analysis tools solution of MEMS multi-bonding to inspect the fusion bonding interface and eutectic bonding interface to locate defect layers.
Journal ArticleDOI
Neutron and Gamma Radiation Effects on MEMS Structures
Petros Gkotsis,Valeriya Kilchytska,Umesh Kumar Bhaskar,Otilia Militaru,Xiaohui Tang,Charalampos Fragkiadakis,Paul B. Kirby,Jean-Pierre Raskin,Denis Flandre,Laurent Francis +9 more
TL;DR: In this article, the effect of radiation and especially neutrons on the electromechanical properties of various materials that are used in microfabrication is investigated. And the results from mechanical and electrical tests on different materials before and after exposure to neutrons radiation are presented.
Book
Micromachining and Microfabrication Process Technology XIII
TL;DR: Some basic reliability principles which any MOEMS/MEMS device development must use are discussed and examples from the commercially successful and highly reliable Digital Micromirror Device complement the discussion.
Book ChapterDOI
Reliability Model for MEMS Accelerometers
TL;DR: A MemS reliability model is developed for quantitative assessment of the MEMS reliability analysis and demonstrates very effective reliability enhancement due to the BISR design.
Dissertation
Inertial control of a beamforming antenna array for use in cellular phones
TL;DR: Schmidt et al. as mentioned in this paper used an inertial navigation system (INS) to control a beamforming array of microstrip patch antennas with the aim of reducing users' exposure to electromagnetic radiation.
References
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Journal Article
Silicon as a mechanical material
TL;DR: In this article, the advantages of employing silicon as a mechanical material, the relevant mechanical characteristics of silicon, and the processing techniques which are specific to micromechanical structures are discussed.