Journal ArticleDOI
Modeling and Characterization of Piezoelectric $d_{33}$ -Mode MEMS Energy Harvester
Reads0
Chats0
TLDR
In this paper, a PbTiO3 seed layer was newly applied as an interlayer between the ZrO2 and Pb(Zr0.52Ti0.48)O3 (PZT) thin films to improve the piezoelectric property of the sol-gel spin-coated PZT thin film.Abstract:
This paper presents the modeling, fabrication, and characterization of a piezoelectric microelectromechanical systems (MEMS) energy harvester using a d33 piezoelectric mode. A theoretical analysis and an analytical modeling for the d33-mode device were first performed to estimate the output power as a function of the material parameters and device geometry. A PbTiO3 seed layer was newly applied as an interlayer between the ZrO2 and Pb(Zr0.52Ti0.48)O3 (PZT) thin films to improve the piezoelectric property of the sol-gel spin-coated PZT thin film. The fabricated cantilever PZT film with an interdigital shaped electrode exhibited a remnant polarization of 18.5 C/cm2, a coercive field of less than 60 kV/cm, a relative dielectric constant of 1125.1, and a d33 piezoelectric constant of 50 pC/N. The fabricated energy-harvesting device generated an electrical power of 1.1 W for a load of 2.2 M with 4.4 Vpeak-to-peak from a vibration with an acceleration of 0.39 g at its resonant frequency of 528 Hz. The corresponding power density was 7.3 mW cm-3 · g-2. The experimental results were compared with those numerically calculated using the equations derived from the dynamic and analytical modeling. The fabricated device was also compared with other piezoelectric MEMS energy-harvesting devices.read more
Citations
More filters
Journal ArticleDOI
High-Performance Piezoelectric Energy Harvesters and Their Applications
TL;DR: A comprehensive review of piezoelectric energy-harvesting techniques developed in the last decade is presented, identifying four promising applications: shoes, pacemakers, tire pressure monitoring systems, and bridge and building monitoring.
Journal ArticleDOI
A comprehensive review on piezoelectric energy harvesting technology: Materials, mechanisms, and applications
TL;DR: A comprehensive review on the state-of-the-art of piezoelectric energy harvesting is presented, including basic fundamentals and configurations, materials and fabrication, performance enhancement mechanisms, applications, and future outlooks.
Journal ArticleDOI
Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output Power
TL;DR: In this paper, a piezoelectric MEMS energy harvesting cantilever with low resonant frequency and wide operation bandwidth was designed, microfabricated, and characterized, where the whole chip was assembled onto a metal carrier with a limited spacer such that the operation frequency bandwidth can be widened to 17 Hz at the input acceleration of 1.0 g during frequency upsweep.
Journal ArticleDOI
A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits
Shashank Priya,Hyun Cheol Song,Yuan Zhou,Ronnie Varghese,Anuj Chopra,Sang-Gook Kim,Isaku Kanno,Liao Wu,Dong Sam Ha,Jungho Ryu,Ronald G. Polcawich +10 more
TL;DR: In this paper, the state-of-the-art in micro-scale piezoelectric energy harvesting, summarizing key metrics such as power density and bandwidth of reported structures at low frequency input.
Journal ArticleDOI
Piezoelectric MEMS for energy harvesting
TL;DR: In this paper, the authors present the current state of the art with respect to the key challenges such as high power density and wide bandwidth of operation, and describe improvements in piezoelectric materials and resonator structure design, which are believed to be the solutions to these challenges.
References
More filters
Journal ArticleDOI
Energy harvesting vibration sources for microsystems applications
TL;DR: A comprehensive review of existing piezoelectric generators is presented in this paper, including impact coupled, resonant and human-based devices, including large scale discrete devices and wafer-scale integrated versions.
Journal ArticleDOI
A study of low level vibrations as a power source for wireless sensor nodes
TL;DR: The goal of this paper is not to suggest that the conversion of vibrations is the best or most versatile method to scavenge ambient power, but to study its potential as a viable power source for applications where vibrations are present.
Journal ArticleDOI
A review of power harvesting using piezoelectric materials (2003–2006)
Steven R. Anton,Henry A. Sodano +1 more
TL;DR: The field of power harvesting has experienced significant growth over the past few years due to the ever-increasing desire to produce portable and wireless electronics with extended lifespans as mentioned in this paper, and the use of batteries can be troublesome due to their limited lifespan, thus necessitating their periodic replacement.
Journal ArticleDOI
Human-powered wearable computing
TL;DR: This paper explores the possibility of harnessing the energy expended during the user's everyday actions to generate power for his or her computer, thus eliminating the impediment of batteries.
Journal ArticleDOI
MEMS power generator with transverse mode thin film PZT
TL;DR: In this paper, a cantilever device is designed to have a flat structure with a proof mass added to the end to create electrical energy via the piezoelectric effect.