Journal ArticleDOI
Acoustic wave sensors: design, sensing mechanisms and applications
TLDR
In this paper, the authors report on commonly used acoustic wave devices in sensor applications as well as the design techniques and fabrication processes, and a portable sensor array system is described, which allows for the integration of a total physical and chemical analysis system in the one IC package, leading to the evolution of smart sensors.Abstract:
Acoustic waves are currently being used in a wide range of sensor fields including physical sensing, chemical sensing and biosensing. Their implementation requires specific knowledge of materials, acoustic wave properties, device design and the sensing mechanisms involved for a wide range of applications. In this paper, the authors report on commonly used acoustic wave devices in sensor applications as well as the design techniques and fabrication processes. Sensing mechanisms and a portable sensor array system are described. The development of IC-based processes, thin-film deposition and sensitive layer fixation will allow for the integration of a total physical and chemical analysis system in the one IC package, leading to the evolution of smart sensors.read more
Citations
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Journal ArticleDOI
Surface acoustic wave biosensors: a review
TL;DR: An overview of 20 years of worldwide development in the field of biosensors based on special types of surface acoustic wave devices that permit the highly sensitive detection of biorelevant molecules in liquid media is presented.
Journal ArticleDOI
Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications
Yong Qing Fu,Yong Qing Fu,Jack Luo,Nam-Trung Nguyen,Anthony J. Walton,Andrew J. Flewitt,Xiaotao Zu,Yifan Li,Glen McHale,Allan Matthews,Enrique Iborra,Hejun Du,William I. Milne,William I. Milne +13 more
TL;DR: In this article, the authors acknowledge support from the Innovative electronic manufacturing research centre (IeMRC) through the EPSRC funded flagship project SMART MICROSYSTEMS.
Mechanism of operation and design considerations for surface acoustic wave device vapor sensors
Abstract: Abstract Surface acoustic wave (SAW) devices offer many attractive features for application as vapour phase chemical microsensors. This paper describes the characteristics of SAW devices and techniques by which they can be employed as vapour sensors. The perturbation of SAW velocity by polymeric coating films is investigated both theoretically and experimentally. Highest sensitivity can be achieved when the device is used as the resonating element in a delay line oscillator circuit. A simple equation has been developed from theoretical considerations which offers reasonably accurate quantitative predictions of SAW device frequency shifts when subjected to a given mass loading. In this mode the SAW device behaves very like conventional bulk-wave quartz crystal microbalances except that the sensitivity can be several orders of magnitude higher and the device size can be several orders of magnitude smaller. Detection of mass changes of a few femtograms by a SAW device having a surface area of 10−4 cm2 is theoretically possible.
Surface acoustic wave gas sensor based on film conductivity changes
TL;DR: The first surface acoustic wave (SAW) sensor that functions via changes in conductivity of a thin surface film is reported in this article, where a lead phthalocyanine (PbPc) thin film is deposited on the acoustic propagation path of a LiNbO 3 SAW delay line, which serves as the feedback element of an oscillator circuit.
Journal ArticleDOI
SAW Sensors for Chemical Vapors and Gases.
TL;DR: This review provides a general overview on the fundamental aspects and some major advances of Rayleigh wave-based SAW sensors in sensing chemicals in a gaseous phase and suggests some appropriate sensing approaches for particular applications.
References
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Journal ArticleDOI
Mechanism of operation and design considerations for surface acoustic wave device vapour sensors.
TL;DR: In this article, a simple equation has been developed from theoretical considerations which offers reasonably accurate quantitative predictions of surface acoustic wave (SAW) device frequency shifts when subjected to a given mass loading.
Mechanism of operation and design considerations for surface acoustic wave device vapor sensors
Abstract: Abstract Surface acoustic wave (SAW) devices offer many attractive features for application as vapour phase chemical microsensors. This paper describes the characteristics of SAW devices and techniques by which they can be employed as vapour sensors. The perturbation of SAW velocity by polymeric coating films is investigated both theoretically and experimentally. Highest sensitivity can be achieved when the device is used as the resonating element in a delay line oscillator circuit. A simple equation has been developed from theoretical considerations which offers reasonably accurate quantitative predictions of SAW device frequency shifts when subjected to a given mass loading. In this mode the SAW device behaves very like conventional bulk-wave quartz crystal microbalances except that the sensitivity can be several orders of magnitude higher and the device size can be several orders of magnitude smaller. Detection of mass changes of a few femtograms by a SAW device having a surface area of 10−4 cm2 is theoretically possible.
Journal ArticleDOI
Higher-Order Temperature Coefficients of the Elastic Stiffinesses and Compliances of Alpha-Quartz
TL;DR: In this paper, the first-, second-, and third-order temperature coefficients of the elastic stiffnesses and compliances of alpha-quartz have been derived from thickness mode resonances of double-rotated quartz plates employing Christoffel's theory of wave propagation.
Journal ArticleDOI
Acoustic Wave Microsensors
TL;DR: In this article, the authors compare and contrast the more commonly used acoustic wave devices and provide a current description of the physical origins of observed sensor responses in both gas- and liquid-phase studies.
Journal ArticleDOI
Smart sensor system for trace organophosphorus and organosulfur vapor detection employing a temperature-controlled array of surface acoustic wave sensors, automated sample preconcentration, and pattern recognition
TL;DR: A smart sensor system for the detection of toxic organophosphorus and toxic organosulfur vapors at trace concentrations has been designed, fabricated, and tested against a wide variety of vapor challenges as mentioned in this paper.