Capacitive micromachined ultrasonic transducers for medical imaging and therapy
TLDR
The presented results prove the CMUT as a MEMS technology for many medical diagnostic and therapeutic applications as well as the progression of developing several generations of fabrication processes.Abstract:
Capacitive micromachined ultrasonic transducers (CMUTs) have been subject to extensive research for the last two decades. Although they were initially developed for air-coupled applications, today their main application space is medical imaging and therapy. This paper first presents a brief description of CMUTs, their basic structure and operating principles. Our progression of developing several generations of fabrication processes is discussed with an emphasis on the advantages and disadvantages of each process. Monolithic and hybrid approaches for integrating CMUTs with supporting integrated circuits are surveyed. Several prototype transducer arrays with integrated front-end electronic circuits we developed and their use for 2D and 3D, anatomical and functional imaging, and ablative therapies are described. The presented results prove the CMUT as a micro-electro-mechanical systems technology for many medical diagnostic and therapeutic applications.read more
Citations
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Journal ArticleDOI
Monitoring of the central blood pressure waveform via a conformal ultrasonic device.
Chonghe Wang,Xiaoshi Li,Hongjie Hu,Lin Zhang,Zhenlong Huang,Muyang Lin,Muyang Lin,Zhuorui Zhang,Zhenan Yin,Brady K. Huang,Hua Gong,Shubha Bhaskaran,Yue Gu,Mitsutoshi Makihata,Yuxuan Guo,Yusheng Lei,Yimu Chen,Chunfeng Wang,Chunfeng Wang,Yang Li,Tianjiao Zhang,Zeyu Chen,Albert P. Pisano,Liangfang Zhang,Qifa Zhou,Sheng Xu +25 more
TL;DR: The design and operation of an ultrasonic device that is conformal to the skin and capable of capturing blood pressure waveforms at deeply embedded arterial and venous sites is described, which enables the non-invasive, continuous and accurate monitoring of cardiovascular events from multiple body locations.
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Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging
Yongqiang Qiu,James Gigliotti,Margeaux Wallace,Flavio Griggio,Christine E. M. Demore,Sandy Cochran,Susan Trolier-McKinstry +6 more
TL;DR: An overview of the current development status of piezoelectric micromachined ultrasound transducers and a discussion of their suitability for miniaturized and integrated devices are presented.
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Looking at sound: optoacoustics with all-optical ultrasound detection.
TL;DR: Different methods of optical ultrasound detection are categorized and key technology trends geared towards the development of all-optical optoacoustic systems are discussed, including how high-bandwidth optical components are replacing conventional piezoelectric and capacitive sound detectors.
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Development and Application of Piezoelectric Materials for Ultrasound Generation and Detection
TL;DR: The historical evolvement associated with piezoelectric use in relation to most medical ultrasound applications is described and is intended to serve as an introduction for non-expert readers.
References
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Journal ArticleDOI
Surface micromachined capacitive ultrasonic transducers
TL;DR: A theoretical model is proposed that agrees well with observed transducer behavior and is used to demonstrate that microfabricated ultrasonic transducers constitute an attractive alternative to piezoelectric transducers in many applications.
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Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging?
Omer Oralkan,Arif Sanli Ergun,J.A. Johnson,Mustafa Karaman,Utkan Demirci,K. Kaviani,Thomas H. Lee,Butrus T. Khuri-Yakub +7 more
TL;DR: The first pulse-echo phased array B-scan sector images using a 128-element, one-dimensional (1-D) linear CMUT array is presented and preliminary investigations on the effects of crosstalk among array elements on the image quality are performed.
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A surface micromachined electrostatic ultrasonic air transducer
TL;DR: In this article, an electrical equivalent circuit model for electrostatic transducers based on the early work of Mason (1942) was designed and constructed for operation at 1.8 and 4.6 MHz.
Journal ArticleDOI
Fabricating capacitive micromachined ultrasonic transducers with wafer-bonding technology
TL;DR: In this paper, a new method for fabricating capacitive micromachined ultrasonic transducers (CMUTs) that uses a wafer bonding technique is introduced. But the method is not suitable for large CMUTs.