Journal ArticleDOI
Electromechanical characterization of Nitinol based RF MEMS switch
TLDR
In this paper, an RF MEMS switch is modeled on a thin bridge which is micromachined and suspended on a layer of dielectric, and a pull-in voltage is applied to the switch.About:
This article is published in Materials Today: Proceedings.The article was published on 2020-01-01. It has received 22 citations till now. The article focuses on the topics: Capacitance & Rise time.read more
Citations
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Journal ArticleDOI
Research Status and Development Trend of MEMS Switches: A Review.
TL;DR: A comparative study of current MEMS switches stressing their strengths and drawbacks is presented, based on performance requirements such as driven voltage, power consumption, and reliability.
Journal ArticleDOI
A study on improved methods in Micro-electromechanical systems technology
J Aditya Khatokar,N. Vinay,Ajay Sudhir Bale,Nayana,R. Harini,V. Suhaas Reddy,N. Soundarya,T.Y. Satheesha,A. Shivashankar Huddar +8 more
TL;DR: The study of miniaturization in Micro-electro-mechanical systems (MEMS) is studied and the advantages of various actuation and their limitations in certain conditions are highlighted.
Journal ArticleDOI
Bio-Inspired Computing-A Dive into Critical Problems, Potential Architecture and Techniques
TL;DR: In this paper, the authors describe the Bio-Nano tools that are developed based on iron oxide properties, automated tools used in the tumor detection, satin bowerbird optimization (SBO) technique employed in diagnosis of skin cancer.
Journal ArticleDOI
Target Application Based Design Approach for RF MEMS Switches using Artificial Neural Networks
Lakshmi Narayana Thalluri,Samuyelu Bommu,Sathuluri Mallikharjuna Rao,K. Srinivasa Rao,Koushik Guha,S. S. Kiran +5 more
Journal ArticleDOI
Investigations on beam membrane and dielectric materials using Ashby’s methodology and their impact on the performance of a MEMS capacitive switch
Kurmendra,Rajesh Kumar +1 more
TL;DR: In this paper, Ashby's material selection methodology is employed for choosing the best material for the beam membrane and dielectric layer by investigating a database of materials, including Young's modulus, Poisson's ratio, thermal coefficient, electrical resistivity, thermal conductivity, and fracture strength.
References
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Journal ArticleDOI
The resonant gate transistor
TL;DR: In this paper, the resonant gate transistor (RGT) is described as an electrostatically excited tuning fork employing field effect transistor readout, which can be batch-fabricated in a manner consistent with silicon technology.
Journal ArticleDOI
M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures
P.M. Osterberg,S.D. Senturia +1 more
TL;DR: In this article, a set of electrostatically actuated microelectromechanical test structures (M-Test) is proposed for measuring material properties at the wafer level during both process development and manufacturing.
Journal ArticleDOI
Electrostatic-comb drive of lateral polysilicon resonators
TL;DR: In this paper, the authors investigate the effect of the finger gap on the capacitance of a capacitated capacitor (electrostatic comb) and find that it has a more pronounced effect on comb characteristics than finger width or length.
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Dynamic micromechanics on silicon: Techniques and devices
TL;DR: In this paper, the authors describe fabrication procedures for constructing thin, electrostatically deflectable SiO 2 membranes on a silicon wafer in a very controllable manner, and three examples of typical applications for the micromechanical structures are discussed.
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Micromechanical membrane switches on silicon
TL;DR: In this paper, the authors describe the design, fabrication, operating behavior, and potential applications of voltage-controlled, micromechanical switches, which are basically extremely small, electrostatically controlled mechanical relays, typically less than 100 µm long.