Patent
Electroosmotic microchannel cooling system
Kenneth E. Goodson,Chuan-Hua Chen,David E. Huber,Linan Jiang,Thomas W. Kenny,Jae-Mo Koo,Daniel J. Laser,James C. Mikkelsen,Juan G. Santiago,Evelyn N. Wang,Shulin Zeng,Lian Zhang +11 more
TLDR
In this article, the authors describe an electroosmotic pump that is capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as well as associated reduction in reliability.Abstract:
Apparatus and methods according to the present invention preferably utilize electroosmotic pumps that are capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as well as the associated reduction in reliability. These electroosmotic pumps are preferably fabricated with materials and structures that improve performance, efficiency, and reduce weight and manufacturing cost relative to presently available micropumps. These electroosmotic pumps also preferably allow for recapture of evolved gases and deposited materials, which may provide for long-term closed-loop operation. Apparatus and methods according to the present invention also allow active regulation of the temperature of the device through electrical control of the flow through the pump and can utilize multiple cooling loops to allow independent regulation of the special and temporal characteristics of the device temperature profiles. Novel microchannel structures are also described.read more
Citations
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Journal ArticleDOI
Three-dimensional integrated circuits
Anna W. Topol,D.C. La Tulipe,L. Shi,David J. Frank,K. Bernstein,Steven E. Steen,Arvind Kumar,G. U. Singco,A. M. Young,K. W. Guarini,Meikei Ieong +10 more
TL;DR: The process steps and design aspects that were developed at IBM to enable the formation of stacked device layers are reviewed, including the descriptions of a glass substrate process to enable through-wafer alignment and a single-damascene patterning and metallization method for the creation of high-aspect-ratio capability.
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High efficiency solid-state light source and methods of use and manufacture
TL;DR: A high-intensity light source is formed by a micro array of a semiconductor light source such as a LEDs, laser diodes, or VCSEL placed densely on a liquid or gas cooled thermally conductive substrate as mentioned in this paper.
Patent
Method and apparatus for efficient vertical fluid delivery for cooling a heat producing device
Thomas W. Kenny,Mark Munch,Peng Zhou,James Gill Shook,Girish Upadhya,Kenneth E. Goodson,Dave Los Altos Hills Corbin,Mark Mcmaster,James Lovette +8 more
TL;DR: In this article, a heat exchanger and method of manufacturing thereof comprises an interface layer for cooling a heat source, which is coupled to the heat source and is configured to pass fluid there through.
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Vapor escape microchannel heat exchanger
TL;DR: In this article, a vapor escape membrane is proposed for use in a heat exchanging device, including a heat pipe or heat sink that runs liquid into a cooling region positioned adjacent to the heat producing device.
References
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High-performance heat sinking for VLSI
TL;DR: In this paper, a water-cooled integral heat sink for silicon integrated circuits has been designed and tested at a power density of 790 W/cm2, with a maximum substrate temperature rise of 71°C above the input water temperature.
Journal ArticleDOI
Convective heat transfer and flow friction for water flow in microchannel structures
Xiaofeng Peng,G. P. Peterson +1 more
TL;DR: The single-phase forced convective heat transfer and flow characteristics of water in microchannel structures/plates with small rectangular channels having hydraulic diameters of 0.133 -0.367 mm were investigated experimentally.
Patent
Silicon semiconductor wafer for analyzing micronic biological samples
TL;DR: In this article, an analytical separation device in which a capillary sized conduit is formed by a channel in a semiconductor device and the channel is closed by a glass plate is described.
Patent
A partitioned microelectronic device array
TL;DR: In this article, a system for processing a plurality of tests or syntheses in parallel comprising a sample channel for moving samples into a microlaboratory array, a station for housing the array and an optical system comprising at least one light source and a light detector for measuring the samples in the array, and a means of electrically connecting said array to an apparatus capable of monitoring and controlling the flow of fluids into the array.