Journal ArticleDOI
Fabrication and performance evaluation of a metal-based bimorph piezoelectric MEMS generator for vibration energy harvesting
TLDR
In this paper, a bimorph microelectromechanical system (MEMS) generator for vibration energy harvesting is presented, which is in cantilever beam structure formed by laminating two lead zirconate titanate thick-film layers on both sides of a stainless steel substrate.Abstract:
This paper presents the development of a bimorph microelectromechanical system (MEMS) generator for vibration energy harvesting. The bimorph generator is in cantilever beam structure formed by laminating two lead zirconate titanate thick-film layers on both sides of a stainless steel substrate. Aiming to scavenge vibration energy efficiently from the environment and transform into useful electrical energy, the two piezoelectric layers on the device can be poled for serial and parallel connections to enhance the output voltage or output current respectively. In addition, a tungsten proof mass is bonded at the tip of the device to adjust the resonance frequency. The experimental result shows superior performance the generator. At the 0.5 g base excitation acceleration level, the devices pooled for serial connection and the device poled for parallel connection possess an open-circuit output voltage of 11.6 VP–P and 20.1 VP–P, respectively. The device poled for parallel connection reaches a maximum power output of 423 μW and an output voltage of 15.2 VP–P at an excitation frequency of 143.4 Hz and an externally applied based excitation acceleration of 1.5 g, whereas the device poled serial connection achieves a maximum power output of 413 μW and an output voltage of 33.0 VP–P at an excitation frequency of 140.8 Hz and an externally applied base excitation acceleration of 1.5 g. To demonstrate the feasibility of the MEMS generator for real applications, we finished the demonstration of a self-powered Bluetooth low energy wireless temperature sensor sending readings to a smartphone with only the power from the MEMS generator harvesting from vibration.read more
Citations
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Journal ArticleDOI
A comprehensive review on piezoelectric energy harvesting technology: Materials, mechanisms, and applications
TL;DR: A comprehensive review on the state-of-the-art of piezoelectric energy harvesting is presented, including basic fundamentals and configurations, materials and fabrication, performance enhancement mechanisms, applications, and future outlooks.
Journal ArticleDOI
A review of energy harvesting using piezoelectric materials: state-of-the-art a decade later (2008–2018)
TL;DR: This paper presents an update to the authors' previous review paper by summarizing the notable developments in the field of piezoelectric energy harvesting through the past decade.
Journal ArticleDOI
A Review on Piezoelectric, Magnetostrictive, and Magnetoelectric Materials and Device Technologies for Energy Harvesting Applications
Fumio Narita,Marina Fox +1 more
TL;DR: State‐of‐the‐art harvesting materials and structures are presented with a focus on characterization, fabrication, modeling and simulation, and durability and reliability, and some perspectives and challenges for the future development of energy harvesting materials are highlighted.
Journal ArticleDOI
Energy Harvesting Research: The Road from Single Source to Multisource.
TL;DR: This is one of the most comprehensive reviews conducted to date, focusing on the entire energy harvesting research scene and providing a guide to seeking deeper and more specific research references and resources from every corner of the scientific community.
Journal ArticleDOI
A piezoelectric spring pendulum oscillator used for multi-directional and ultra-low frequency vibration energy harvesting
TL;DR: In this paper, a simple piezoelectric spring architecture based on a common binder clip structure was proposed for low frequency vibration harvesting, which can efficiently scavenge not only ultra-low frequency but also multi-directional vibrational energies.
References
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Journal ArticleDOI
A piezoelectric vibration based generator for wireless electronics
Shad Roundy,Paul K. Wright +1 more
TL;DR: In this paper, a vibration-based piezoelectric generator has been developed as an enabling technology for wireless sensor networks, where the authors discuss the modeling, design, and optimization of the generator based on a two-layer bending element.
Journal ArticleDOI
PicoRadio supports ad hoc ultra-low power wireless networking
TL;DR: The authors present a configurable architecture that enables these opportunities to be efficiently realized in silicon and believe that this energy-conscious system design and implementation methodology will lead to radio nodes that are two orders of magnitude more efficient than existing solutions.
Journal ArticleDOI
Improving power output for vibration-based energy scavengers
Shad Roundy,Eli S. Leland,Jessy Baker,Eric Carleton,Elizabeth K. Reilly,E. Lai,Brian Otis,Jan M. Rabaey,Paul K. Wright,V. Sundararajan +9 more
TL;DR: This paper modeled, designed, and built small cantilever-based devices using piezoelectric materials that can scavenge power from low-level ambient vibration sources, and presents some new designs that can be tuned to the frequency of the host surface, thereby expanding the method's flexibility.
Journal ArticleDOI
Thin Film Piezoelectrics for MEMS
TL;DR: In this article, the authors reviewed the literature in this field, with an emphasis on the factors that impact the magnitude of the available piezoelectric response for non-ferroelectric materials such as ZnO and AlN.
Journal ArticleDOI
MEMS power generator with transverse mode thin film PZT
TL;DR: In this paper, a cantilever device is designed to have a flat structure with a proof mass added to the end to create electrical energy via the piezoelectric effect.
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