Journal ArticleDOI
Formation and Properties of Porous Silicon and Its Application
TLDR
In this paper, a new isolation technique for bipolar integrated circuits was proposed by making use of the properties of the film such that it can be formed several microns thick and oxidized easily to form an insulator.Abstract:
Preparation, properties, and applications of porous silicon film were investigated. Silicon single crystal is converted into porous silicon film by anodization in concentrated hydrofluoric acid at currents below the critical current density. When an n‐type silicon was anodized, the silicon surface was illuminated to generate holes which were necessary for this anodic reaction. The growth rate of the film, from n‐type silicon, was larger than that from p‐type silicon in this experimental condition. The crystalline structure was the same as that of silicon single crystal. A new isolation technique for bipolar integrated circuits was proposed by making use of the properties of the film such that it can be formed several microns thick and oxidized easily to form an insulator. The main feature of the technique is that it provides a means to form thick insulating film inlaid through the n‐type epitaxial layer without prolonged heat‐treatment. A preliminary experiment was carried out to test the practical usage of the technique.read more
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Silicon as a mechanical material
TL;DR: This review describes the advantages of employing silicon as a mechanical material, the relevant mechanical characteristics of silicon, and the processing techniques which are specific to micromechanical structures.
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Silicon as a mechanical material
TL;DR: In this article, the advantages of employing silicon as a mechanical material, the relevant mechanical characteristics of silicon, and the processing techniques which are specific to micromechanical structures are discussed.
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The structural and luminescence properties of porous silicon
TL;DR: A large amount of work world wide has been directed towards obtaining an understanding of the fundamental characteristics of porous Si as mentioned in this paper, and the key importance of crystalline Si nanostructures in determining the behaviour of porous si is highlighted.
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The MEMS Handbook
TL;DR: In this paper, the authors present a detailed overview of the history of the field of flow simulation for MEMS and discuss the current state-of-the-art in this field.
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Morphology and Formation Mechanisms of Porous Silicon
TL;DR: In this paper, a conceptual analysis of the various aspects in the morphology and formation mechanisms of porous silicon in light of currently available information on the fundamental reaction processes on silicon electrodes is presented.