Journal ArticleDOI
Integrated RF inductors with micro-patterned NiFe core
TLDR
In this paper, an integrated radio-frequency solenoids with micro-patterned magnetic cores for reduced dimensions and compatibility with CMOS/BiCMOS process technology is presented and discussed.Abstract:
Integrated radio-frequency solenoids with micro-patterned magnetic cores for reduced dimensions and compatibility with CMOS/BiCMOS process technology are presented and discussed. It is demonstrated that the use of a ferromagnetic (FM) core leads to a more than 20-fold enhanced inductance per area. This is achieved by tailoring the anisotropy of the FM core and the design of the metal coil structure. Both a higher operating frequency and a larger inductance are obtained by increasing the shape aspect ratio of the FM core and by depositing the magnetic film under an external magnetic field. A reference to an optimum shape anisotropy has been created by measuring the FM core inductors with an external DC magnetic field. An optimum practical trade-off of inductance and operating frequency results from patterning of the FM core.read more
Citations
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Journal ArticleDOI
Integrated RF On-Chip Inductors With Patterned Co-Zr-Ta-B Films
TL;DR: In this paper, the Co-Zr-Ta-B films are patterned into the shape of fingers in the magnetic via region to improve the on-chip inductors, high frequency response.
Journal ArticleDOI
Porous silicon for electrical isolation in radio frequency devices: A review
Gaël Gautier,Philippe Leduc +1 more
TL;DR: In this article, the authors present all the possible porous silicon substrates, which can be used for RF devices, and the intrinsic electrical properties of porous silicon such as AC electrical conductivity or dielectric constant are also detailed.
Journal ArticleDOI
Improved Frequency Response of On-Chip Inductors With Patterned Magnetic Dots
TL;DR: In this article, single-turn spiral inductors with magnetic material to enhance inductance were fabricated using double-layered Permalloy dots above and below the inductor metal.
Journal ArticleDOI
Improved High Frequency Response and Quality Factor of On-Chip Ferromagnetic Thin Film Inductors by Laminating and Patterning Co-Zr-Ta-B Films
TL;DR: In this paper, the authors report the improvement of high frequency response and quality factor of on-chip inductors by integrating ferromagnetic thin films (Co-Zr-Ta-B) including two different combinations of laminations and 500 nm thick non-laminated film.
Journal ArticleDOI
Sub-100 μm scale on-chip inductors with CoZrTa for GHz applications
Wei Xu,Hao Wu,Donald S. Gardner,Saurabh Sinha,Tawab Dastagir,Bertan Bakkaloglu,Yu Cao,Hongbin Yu +7 more
TL;DR: In this paper, the effect of increasing the magnetic film thickness on the performance of strip line inductors was measured and modeled, and significantly larger increases in inductance and quality factor at above 1 GHz were achieved.
References
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Book
Magnetization Oscillations and Waves
TL;DR: In this paper, an analysis of Ferromagnetic Resonance in anisotropic Ferromagnet Magnetocrystalline Anisotropy originates from the origin of magnetically active materials.
Journal ArticleDOI
Demagnetizing Field in Nonellipsoidal Bodies
R. I. Joseph,E. Schlömann +1 more
TL;DR: In this paper, a general method for calculating the (nonuniform) demagnetizing field in ferromagnetic bodies of arbitrary shape is described, based upon the assumption that the magnitude of the magnetization vector is constant throughout the sample and that its direction coincides with the direction of the local magnetic field at any point within the sample.
Journal ArticleDOI
On the design of RF spiral inductors on silicon
TL;DR: In this article, a review of design principles for implementation of a spiral inductor in a silicon integrated circuit fabrication process summarizes prior art in this field, and a fast and physics-based inductor model is exploited to put the results contributed by many different groups in various technologies and achieved over the past eight years into perspective.
Journal ArticleDOI
Properties of a new soft magnetic material
TL;DR: A new soft magnetic material with a saturation magnetization of 24 kilogauss and a large permeability of 1,000–1,400 in a wide frequency range of up to about 1.2 gigaherz is described, which promises to have wide application in devices such as magnetic recording heads and integrated inductors.
Journal ArticleDOI
Magnetics on silicon: an enabling technology for power supply on chip
TL;DR: In this paper, a review of magnetics-on-silicon showed that inductance values of 20 to 40nH/mm/sup 2/ can be achieved for winding resistances less than 1/spl Omega/.