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Journal ArticleDOI

Lightweight Torque Sensor Based on a Gradient Grating Period Guided-Mode Resonance Filter

Yen-Chieh Wang, +2 more
- 15 Aug 2019 - 
- Vol. 19, Iss: 16, pp 6610-6617
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TLDR
In this paper, the authors describe the design, fabrication, and testing of a lightweight and compact torque sensor system based on a gradient grating period guided-mode resonance (GGP-GMR) filter and a flexure-elastic-force-sensing element.
Abstract
This paper describes the design, fabrication, and testing of a lightweight and compact torque sensor system based on a gradient grating period guided-mode resonance (GGP-GMR) filter and a flexure–elastic-force-sensing element. The GMR filter exhibits a characteristic resonant reflection, when illuminated with a broadband light source at normal incidence. Instead of a fixed grating period, the GGP-GMR filter consists of grating periods varying from 250 to 550 nm with an increment of 2 nm. Given the flexibility of the plastic-based GGP-GMR filter, it can be bent conform to the cylindrical surface of the flexure. The applied torque induced deformation of the flexure and angular displacement of the attached GGP-GMR. For a stationary light source, the angular displacement of the GGP-GMR filter results in illumination at different locations (grating periods), leading to a shift of the resonant reflection wavelength. The magnitude of shift in the reflection wavelength can be correlated to the magnitude of deformation and the applied torque. In addition, commercial software based on the finite element method was used to simulate the proposed design, which indicates that the flexure made of medium-carbon steel can withstand the torque of 35 Nm without yielding. Furthermore, the simulation results (torque-induced deformation) were consistent with those obtained using the proposed torque sensor system. Torque measurements from 0 to 25 Nm showed good linearity. The limit of detection achieved was 0.77 Nm.

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Citations
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References
More filters
Journal ArticleDOI

Theory and applications of guided-mode resonance filters

TL;DR: The guided-mode resonance filter represents a basic new optical element with significant potential for practical applications and is presented and explained.
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Design of waveguide-grating filters with symmetrical line shapes and low sidebands.

TL;DR: It is shown that ideal reflection filters can be designed by combining guided-mode resonance effects in waveguide gratings with antireflection effects of thin-film structures and a single-layer filter with multilayer design.
Journal ArticleDOI

Resonant grating–waveguide structures for visible and near-infrared radiation

TL;DR: In this paper, a new ray picture model based on the multiple interference of light waves in dielectric resonant grating-waveguide structures is presented, which clearly elucidates the phase relationship between the incident plane wave and the waves diffracted from the grating structure that is responsible for the interference of these waves.
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A Six-Axis MEMS Force–Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution

TL;DR: In this article, a six-axis microelectromechanical system (MEMS) force-torque sensor is presented. Butts et al. describe a movable body is suspended by flexures that allow deflections and rotations along the x-, y-, and z-axes.
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Design and fabrication of a six-dimensional wrist force/torque sensor based on E-type membranes compared to cross beams

TL;DR: In this article, the authors presented a novel device for measuring components of forces and moments along and about three orthogonal axes based on E-type membranes compared to conventional sensor based on cross beams.
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