Journal ArticleDOI
Microactuators and their technologies
Ernst Thielicke,Ernst Obermeier +1 more
TLDR
An overview of microactuators, focussing on devices made by microfabrication technologies which are based on silicon processes like photolithography, etching, thin film deposition etc, which are promising devices for future medical, biological and technical applications like minimal invasive surgery or the vast field of information storage and distribution.About:
This article is published in Mechatronics.The article was published on 2000-06-01. It has received 185 citations till now. The article focuses on the topics: Microelectromechanical systems & Bulk micromachining.read more
Citations
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Journal ArticleDOI
A review of microvalves
Kwang W. Oh,Chong H. Ahn +1 more
TL;DR: A brief overview of microvalves can be found in this paper, where the authors focus on the actuation mechanisms and their applications, including flow regulation, on/off switching and sealing of liquids, gases or vacuums.
Patent
Lithographic apparatus, and device manufacturing method
Maarten Marinus Johannes Wilhelmus Van Herpen,Vadim Yevgenyevich Banine,Johannes Peterus Henricus De Kuster,Johannes Hubertus Josephina Moors,Lucas Henricus Johannes Stevens,Bastiaan Theodoor Wolschrijn,Yurii Victorovitch Sidelnikov,Marc Hubertus Lorenz Van Der Velden,Wouter Anthon Soer,Thomas Stein,K Kurt Gielissen +10 more
TL;DR: In this article, a lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is described, which includes a first radiation dose detector and a second radiation dose detectors, each detector comprising a secondary electron emission surface configured to receive a radiation flux and to emit secondary electrons due to the receipt of the radiation flux.
Journal ArticleDOI
MEMS actuators and sensors: observations on their performance and selection for purpose
TL;DR: In this paper, the performance of microelectromechanical systems (MEMS) actuators and sensors as a function of operating principle is compared with each other and with equivalent macroscopic devices.
Journal ArticleDOI
Micropumps, microvalves, and micromixers within PCR microfluidic chips: Advances and trends.
Chunsun Zhang,Da Xing,Yuyuan Li +2 more
TL;DR: The microvalve/micropump/micromixers allow high levels of PCR chip integration and analytical throughput and the advances of microvalves, micropumps, and micromixer within PCR microfluidic chips over the past ten years are surveyed.
Journal ArticleDOI
BioMEMS for drug delivery
TL;DR: Various approaches to the use of MEMS for drug therapy, including devices based on microporous silicon, microneedles, micropumps, and microreservoirs are reviewed.
References
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Journal ArticleDOI
Silicon as a mechanical material
TL;DR: This review describes the advantages of employing silicon as a mechanical material, the relevant mechanical characteristics of silicon, and the processing techniques which are specific to micromechanical structures.
Journal Article
Silicon as a mechanical material
TL;DR: In this article, the advantages of employing silicon as a mechanical material, the relevant mechanical characteristics of silicon, and the processing techniques which are specific to micromechanical structures are discussed.
Journal ArticleDOI
Microfluidics-a review
TL;DR: An overview of research activities in the field of fluid components or systems built with microfabrication technologies is given in this paper, focusing on the fluidic behaviour of the various devices, such as valves, pumps and flow sensors as well as the possibilities and pitfalls related to the modelling of these devices using simple flow theory.
Journal ArticleDOI
A piezoelectric micropump based on micromachining of silicon
TL;DR: In this article, the design and realization of two pumps based on micromachining of silicon are described, which are of the reciprocating displacement type, comprise one or two pump chambers, a thin glass pump membrane actuated by a piezoelectric disc and passive silicon check valves to direct the flow.
Journal ArticleDOI
Stiction in surface micromachining
TL;DR: In this article, four major adhesion mechanisms have been analyzed: capillary forces, hydrogen bridging, electrostatic forces and van der Waals forces, and they have been successfully reduced.