Journal ArticleDOI
Nucleation and Growth during Al2O3 Atomic Layer Deposition on Polymers
TLDR
In this paper, the nucleation and growth during Al2O3 atomic layer deposition (ALD) were explored on a variety of polymer films at 85 °C, using sequential exposures of Al(CH3)3 [trimethylalumi...Abstract:
Nucleation and growth during Al2O3 atomic layer deposition (ALD) were explored on a variety of polymer films at 85 °C. Al2O3 ALD was performed using sequential exposures of Al(CH3)3 [trimethylalumi...read more
Citations
More filters
Journal ArticleDOI
Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
TL;DR: Puurunen et al. as discussed by the authors summarized the two-reactant ALD processes to grow inorganic materials developed to-date, updating the information of an earlier review on ALD.
Journal ArticleDOI
Synthesis and Surface Engineering of Complex Nanostructures by Atomic Layer Deposition
TL;DR: Atomic layer deposition (ALD) has become the method of choice for the semiconductor industry to conformally process extremely thin insulating layers (high-k oxides) onto large-area silicon substrates as discussed by the authors.
Journal ArticleDOI
Applications of atomic layer deposition to nanofabrication and emerging nanodevices
TL;DR: In this paper, the authors review current research trends in ALD processes, focusing on the application of ALD to emerging nanodevices utilizing fabrication through nanotechnology, and present a review of the most recent ALD applications.
Journal ArticleDOI
Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al2O3 and Rapid SiO2 Atomic Layer Deposition
Arrelaine A. Dameron,Stephen D. Davidson,Beau B. Burton,Peter F. Carcia,R. Scott McLean,Steven M. George +5 more
TL;DR: In this paper, multilayers of Al2O3 ALD and SiO2 ALD were grown on Kapton and heat-stabilized polyethylene naphthalate substrates.
References
More filters
Journal ArticleDOI
Verwendung von Schwingquarzen zur Wägung dünner Schichten und zur Mikrowägung
TL;DR: In this paper, eigenfrequenz der Platte infolge Vergroserung der schwingenden Masse is vermessen, so das eine empirische Eichung bei der Schichtwagung mit Schwingquarzen entfallt.
Journal ArticleDOI
Use of quartz vibration for weighing thin films on a microbalance
G. Sauerbrey,F. Sauerbrey +1 more
Journal Article
The use of quarts oscillators for weighing thin layers and for microweighing
G. Sauerbrey,G.Z. Sauerbrey +1 more
Journal ArticleDOI
Polymer-layered silicate nanocomposites: an overview
TL;DR: An overview of polymer-clay hybrid nanocomposites is provided with emphasis placed on the use of alkylammonium exchanged smectite clays as the reinforcement phase in selected polymer matrices as discussed by the authors.
Journal ArticleDOI
Low-Temperature Al2O3 Atomic Layer Deposition
TL;DR: In this article, the properties of low-temperature Al2O3 ALD films were investigated versus growth temperature by depositing films on Si(100) substrates and quartz crystal microbalance (QCM) sensors.