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Journal ArticleDOI

Process optimization and characterization of silicon microneedles fabricated by wet etch technology

TLDR
The influence of the mask design and the processing environment such as etching parameters and etch bath conditions on the formation of silicon microneedle structures (needle height up to 300 μm) and its reproducibility are demonstrated and single needle shear tests have been carried out.
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This article is published in Microelectronics Journal.The article was published on 2005-07-01. It has received 201 citations till now. The article focuses on the topics: Etching (microfabrication) & Wafer.

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Citations
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Journal ArticleDOI

Microneedles for drug and vaccine delivery.

TL;DR: Building off a strong technology base and multiple demonstrations of successful drug delivery, microneedles are poised to advance further into clinical practice to enable better pharmaceutical therapies, vaccination and other applications.
Journal ArticleDOI

Microneedle arrays as transdermal and intradermal drug delivery systems: Materials science, manufacture and commercial development

TL;DR: In this paper, a review of microneedle arrays can increase the number of compounds amenable to transdermal delivery by penetrating the skin's protective barrier, the stratum corneum, and creating a pathway for drug permeation to the dermal tissue below.
Journal ArticleDOI

Microneedle-based drug delivery systems: microfabrication, drug delivery, and safety.

TL;DR: Microneedles (MNs), when used to puncture skin, will by-pass the SC and create transient aqueous transport pathways of micron dimensions and enhance the transdermal permeability.
Journal ArticleDOI

Microneedles for intradermal and transdermal drug delivery

TL;DR: Recent and future developments for MN technology including the latest type of MN design, challenges and strategies in MNs development as well as potential safety aspects based on comprehensive literature review pertaining to MN studies to date are focused on.
Journal ArticleDOI

Microneedle, bio-microneedle and bio-inspired microneedle: A review

TL;DR: A review of studies on the mechanics problems with respect to micro‐scale needles used for drug delivery and other targets and some bio‐microneedles and bio‐inspired MNs are introduced.
References
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Journal ArticleDOI

Microfabricated microneedles: a novel approach to transdermal drug delivery.

TL;DR: These microneedle arrays could be easily inserted into skin without breaking and were shown to increase permeability of human skin in vitro to a model drug, calcein, by up to 4 orders of magnitude.
Journal ArticleDOI

Insertion of microneedles into skin: measurement and prediction of insertion force and needle fracture force.

TL;DR: The ability to predict insertion and fracture forces is provided, which facilitates rational design of microneedles with robust mechanical properties.
Journal ArticleDOI

Silicon micromachined hollow microneedles for transdermal liquid transport

TL;DR: In this article, an out-of-plane hollow microneedles are fabricated using a sequence of deep-reactive ion etching (DRIE), anisotropic wet etching and conformal thin film deposition.
Journal ArticleDOI

Side-opened out-of-plane microneedles for microfluidic transdermal liquid transfer

TL;DR: In this paper, the first hollow out-of-wafer-plane silicon microneedles having openings in the shaft rather than having an orifice at the tip were presented.
Proceedings ArticleDOI

Micromachined needles for the transdermal delivery of drugs

TL;DR: These microneedles were fabricated using the Black Silicon Method, which is a reactive ion etching process in which an SF/sub 6//O/sub 2/ plasma etches silicon anisotropically and demonstrated excellent mechanical properties and skin permeability to calcein, a model drug, by up to four orders of magnitude.
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