Journal ArticleDOI
Residual stress in low pressure chemical vapor deposition SiNx films deposited from silane and ammonia
TLDR
In this paper, the influence of the deposition parameters (temperature, total pressure and NH3/SiH4 gaseous ratio) on the film deposition rate, refractive index, stoichiometry and thermomechanical stress are investigated and correlated.Abstract:
Varied SiNx films have been deposited by low pressure chemical vapor deposition from silane SiH4 and ammonia NH3 and the influences of the deposition parameters (temperature, total pressure and NH3/SiH4 gaseous ratio) on the film deposition rate, refractive index (assessed at a 830 nm wavelength), stoichiometry and thermomechanical stress are investigated and correlated. Low stress (≈600 MPa) Si3N4 films are obtained for the highest deposition temperature and the lowest total pressure but the gaseous ratio is shown to be the dominant parameter. According to the SiNx stoichiometry, silicon-rich silicon nitride and nitrogen-doped silicon (called NIDOS) depositions are obtained and compressive to tensile stresses are reported. A maximum in compressive stress is put into evidence for N/Si ratio roughly equal to 0.7 and is related to the cumulated effects of silicon nitridation and crystallization, characterizing the transition between nitrogen-doped silicon and silicon-rich silicon nitride. Finally, by consid...read more
Citations
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Journal ArticleDOI
Anemometer with hot platinum thin film
Frédérick Mailly,Alain Giani,R. Bonnot,Pierre Temple-Boyer,Frédérique Pascal-Delannoy,Alain Foucaran,A. Boyer +6 more
TL;DR: In this article, a suspended membrane of silicon rich silicon nitride SiNx makes it possible to carry out the heat insulation between the heater and the substrate, and the experiments show that the temperature rise of the sensor is not sensitive to the ambient temperature.
Journal ArticleDOI
Micromachined thermal accelerometer
TL;DR: In this paper, the temperature profile becomes asymmetric when an acceleration is applied, and two temperature detectors are placed on both sides to measure the differential temperature, and the sensitivity is proportional to the heating power and decreases when the room temperature increases.
Journal ArticleDOI
Nanowire photonic crystal waveguides for single-atom trapping and strong light-matter interactions
Su-Peng Yu,J. D. Hood,Juan A. Muniz,Michael J. Martin,Richard A. Norte,Chen-Lung Hung,Seán M. Meenehan,Justin D. Cohen,Oskar Painter,H. J. Kimble +9 more
TL;DR: In this article, a comprehensive study of dispersion-engineered nanowire photonic crystal waveguides suitable for experiments in quantum optics and atomic physics with optically trapped atoms is presented.
Journal ArticleDOI
Waveguide-integrated superconducting nanowire single-photon detectors
TL;DR: In this article, the authors review the performance metrics of waveguide-coupled superconducting detectors and compare them with dielectric waveguide material systems and present prominent emerging applications.
Journal ArticleDOI
Influence of deposition conditions on mechanical properties of low-pressure chemical vapor deposited low-stress silicon nitride films
TL;DR: In this article, the effect of deposition temperature, deposition pressure, or input gas ratio (SiH2Cl2:NH3) on film stress was determined for low-pressure chemical vapor deposited silicon nitride films.
References
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Journal ArticleDOI
The Tension of Metallic Films Deposited by Electrolysis
TL;DR: It is well known that metallic films deposited electrolytically are in many cases liable to peel off if deposited to any considerable thickness as discussed by the authors, especially if it does not adhere very tightly to the body on which it is deposited.
Journal ArticleDOI
Thermally excited silicon microactuators
W. Riethmuller,Wolfgang Benecke +1 more
TL;DR: In this paper, a cantilever-type micromachined silicon actuator based on the bimetal effect used extensively for the fabrication of temperature-controlled electrical switches is described.
Journal ArticleDOI
A femtojoule calorimeter using micromechanical sensors
J. R. Barnes,Robert John Stephenson,C. N. Woodburn,SJ O'Shea,Mark E. Welland,Trevor Rayment,James K. Gimzewski,Ch. Gerber +7 more
TL;DR: In this paper, the authors describe a highly sensitive new type of calorimeter based on the deflection of a "bimetallic" micromechanical sensor as a function of temperature.
Journal ArticleDOI
Thermal stresses and cracking resistance of dielectric films (SiN, Si3N4, and SiO2) on Si substrates
TL;DR: In this article, the authors constructed an apparatus for measurement of thermal stresses in thin dielectric films (25-500°C), obtained results on various reactively plasma deposited (RPD) SiN and CVD SiO2 films, and developed a model which quantifies the cracking resistance of different types of RPD SiN films.
Journal ArticleDOI
Characterization of Silicon Nitride Films
TL;DR: In this article, various silicon nitride films have been prepared from, N2,, and in an rf-promoted glow discharge reaction using infrared absorption, aided by ultraviolet absorption, the inclusion of excess silicon or of oxygen in the films is readily followed.