Journal ArticleDOI
Silicon torsional scanning mirror
TLDR
This device is extremely simple to make and operate, has operational characteristics comparable to commercial magnetically driven high-frequency scanners, and has exhibited a promising reliability.Abstract:
Conventional batch photolithography and thin film techniques are employed to fabricate an electrostatically driven torsional scanning mirror from single-crystal silicon. This device is extremely simple to make and operate, has operational characteristics comparable to commercial magnetically driven high-frequency scanners, and has exhibited a promising reliability.read more
Citations
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Journal ArticleDOI
Silicon as a mechanical material
TL;DR: This review describes the advantages of employing silicon as a mechanical material, the relevant mechanical characteristics of silicon, and the processing techniques which are specific to micromechanical structures.
Journal Article
Silicon as a mechanical material
TL;DR: In this article, the advantages of employing silicon as a mechanical material, the relevant mechanical characteristics of silicon, and the processing techniques which are specific to micromechanical structures are discussed.
Patent
Spatial light modulator and method
TL;DR: An electrostatically deflectable beam spatial light modulator with the beams (30), address electrodes (42, 46), and landing electrodes (40, 41) to provide soft-landing of the beams on the landing electrodes as mentioned in this paper.
Journal ArticleDOI
Stiction in surface micromachining
TL;DR: In this article, four major adhesion mechanisms have been analyzed: capillary forces, hydrogen bridging, electrostatic forces and van der Waals forces, and they have been successfully reduced.
Patent
Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
TL;DR: In this article, a spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry, where one or more electrostatically deflectable elements are suspended by hinges from the upper substrate.
References
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Book
Formulas for Stress and Strain
TL;DR: In this article, the authors propose formulas for stress and strain in the form of formulas for strain and stress, which are derived from the formula for stress-and-stress and strain.
Journal ArticleDOI
Field Assisted Glass‐Metal Sealing
TL;DR: In this paper, a new process is described which permits the sealing of metals to glass and other insulators at temperatures well below the softening point of the glass, by applying a dc voltage in excess of a few hundred volts between the glass and the metal in such a way that the former is at a negative potential with respect to the latter.
Journal ArticleDOI
Ink jet printing nozzle arrays etched in silicon
E. Bassous,H. H. Taub,L. Kuhn +2 more
TL;DR: Ink jet printing nozzle arrays in the form of truncated pyramidal holes anisotropically etched into a silicon substrate have been fabricated in this paper, with excellent performance characteristics with regard to uniformity of direction, velocity, and drop formation.