Journal ArticleDOI
Design and control of a long-traveling nano-positioning stage
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TLDR
In this paper, a dual-axis long-traveling nano-positioning stage (DALTNPS) is presented, which consists of a traditional ball-screw stage and a three-degrees-of-freedom (3-DOF) piezo-stage.Abstract:
In this paper, a Dual-Axis Long-Traveling Nano-Positioning Stage (DALTNPS) is presented. In order to extend the traveling and increase the accuracy, the two sorts of stages, a traditional ball-screw stage and a three-degrees-of-freedom (3-DOF) piezo-stage, were composed. The traditional ball-screw stage which is composed of two guide-ways and a ball-screw at each axis is a long-travel stage, and the 3-DOF piezo-stage, which is composed of three piezoelectric actuators and four translation–rotation mechanisms, is a high precision stage. In addition, a 3-DOF measuring system and a PID controller are composed of a 3-DOF closed-loop controller and applied to implement the DALTNPS. The measuring system which is composed of two laser interferometers and two plane mirrors is a 3-DOF optical measuring system. Thus, the position at the x and y axes and the rotation around the z axis can be obtained and they are the responses of DALTNPS. Finally, the experiment results evidence that the DALTNPS is characterized by long-travel, high linear accuracy, high rotation accuracy, high contouring accuracy and high motion speed.read more
Citations
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Journal ArticleDOI
A review on control strategies for compensation of hysteresis and creep on piezoelectric actuators based micro systems
TL;DR: It has been observed that appropriate control strategies has to be implemented for reducing tracking error, position error and non-linear characteristic of piezoelectric actuator namely hysteresis and creep.
Journal ArticleDOI
A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement
TL;DR: In this article, a three-axis surface encoder was developed for stage motion measurement with sub-nanometric resolutions, which was composed of a scale XY planar grating with X- and Y-directional periodic grating structures and an optical sensor head for reading the grating structure.
Journal ArticleDOI
Two-photon polymerisation 3D printed freeform micro-optics for optical coherence tomography fibre probes
Jiawen Li,Peter Fejes,Dirk Lorenser,Bryden C. Quirk,Peter B. Noble,Rodney W. Kirk,Antony Orth,Fiona M. Wood,Brant C. Gibson,David D. Sampson,David D. Sampson,Robert A. McLaughlin,Robert A. McLaughlin +12 more
TL;DR: 3D printing of OCT probes with miniaturised freeform optics with surface roughness acceptable for optical applications is demonstrated and proof-of-principle imaging of biological samples is demonstrated.
Journal ArticleDOI
Model and Control of a Compact Long-Travel Accurate-Manipulation Platform
TL;DR: Wang et al. as mentioned in this paper used strain gauge as the accurate manipulator's positioning sensor and developed a displacement-prediction method to achieve a long-travel accurate positioning (positioning error no more than 2% of the traveling range).
Journal ArticleDOI
Large range nanopositioning stage design: A three-layer and two-stage platform
TL;DR: In this article, a two-dimensional nanopositioning platform (NanoPla) is described, which is characterized by a three-layer architecture and two-stage motion strategy.
References
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Journal ArticleDOI
Dynamic piezoelectric translation devices
TL;DR: In this article, the principle of inertial sliding of a platform on a periodically accelerated support is exploited for the design of a piezoelectric finepositioning device, which provides step sizes of 0.04-0.2 μ, speeds of up to 0.2 mm/s, and practically unlimited translation range.
Journal ArticleDOI
Design of parallel robots in microrobotics
TL;DR: This paper reviews both the design guidelines for microrobots and the advantages of using parallel robots in very high precision applications.
Journal ArticleDOI
Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage
TL;DR: In this article, a measuring system for the simultaneous measurement of six-degrees-of-freedom motion errors of a moving stage is presented, which integrates a miniature fiber coupled laser interferometer with specially designed optical paths and quadrant detectors.
Journal ArticleDOI
A six-degree-of-freedom micro-manipulator based on piezoelectric translators
Peng Gao,Shan-Min Swei +1 more
TL;DR: In this article, a single-degree-of-freedom translator composed of a piezoelectric stack, a monolithic leaf spring and a preload mechanism was developed. And the displacement resolution reached by this translator is better than 10 nm, while its natural frequency is over 2 kHz.
Journal ArticleDOI
Development of a simple test device for spindle error measurement using a position sensitive detector
TL;DR: In this paper, a rotational fixture with a built-in laser diode and four batteries was used to measure the spindle error. But, the measurement of the tilt angular errors was not performed.