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Journal ArticleDOI

Design of a triangular platform piezoresistive affinity microcantilever sensor for biochemical sensing applications

Ribu Mathew, +1 more
- 21 Apr 2015 - 
- Vol. 48, Iss: 20, pp 205402
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TLDR
In this paper, a triangular cantilever platform with integrated piezoresistors was proposed for biochemical sensing applications, and its performance was evaluated in terms of the figure of merit (FoM) and measurement bandwidth.
Abstract
Microcantilever platforms with integrated piezoresistors have found versatile applications in the field of clinical analysis and diagnostics. Even though treatise encompasses numerous design details of the cantilever based biochemical sensors, a majority of them focus on the generic slender rectangular cantilever platform mainly due to its evolution from the atomic force microscope (AFM). The reported designs revolve around the aspects of dimensional optimization and variations with respect to the combination of materials for the composite structure. In this paper, a triangular cantilever platform is shown to have better performance metrics than the reported generic slender rectangular and the square cantilever platforms with integrated piezoresistors for biochemical sensing applications. The selection and optimization of the triangular cantilever platform is carried out in two stages. In the first stage, the preliminary selection of the cantilever shape is performed based on the initial design obtained by analytical formulae and numerical simulations. The second stage includes the geometrical optimization of the triangular cantilever platform and the integrated piezoresistor. The triangular cantilever platform shows a better performance in terms of the figure of merit (FoM), and the measurement bandwidth. The simulation results show that the magnitude of ψ of the triangular platform is 77.21% and 65.64% higher than that of the slender rectangular and the square cantilever platforms respectively. Moreover, the triangular platform exhibits a measurement bandwidth that is 70.91% and 2.04 times higher than that of the slender rectangular and square cantilever structures respectively. For a better understanding of the 2D nature of the stress generated on the cantilever platform due to the surface stress, its spatial profile has been extracted and depicted graphically. Finally, a set of design rules are provided for optimizing the triangular cantilever platform and piezoresistor dimensions in terms of the electrical sensitivity and the mechanical stability for biochemical sensing applications.

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Citations
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Journal ArticleDOI

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

TL;DR: This review article would serve as a guideline for researchers to understand specifics and functionality of surface stress-based piezoresistive SU-8 polymeric cantilever sensors.
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Clinically relevant analytical techniques, organizational concepts for application and future perspectives of point-of-care testing

TL;DR: The underlying emerging techniques that are based on advanced microfluidics and nanomaterials, device miniaturization, and multiplexing the detection mode are described, contributing significantly to the future perspectives of this nascent diagnostic modality.
Journal ArticleDOI

Performance comparison of a single element piezoresistor with a half-active Wheatstone bridge for miniaturized pressure sensors

TL;DR: In this paper, the performance of a single element piezoresistor (3TP-1) is compared with a half-active WSB configuration and other single element PAs, such as four terminal PAs (4TP), multi-terminal PAs(MTP), and another three terminal PEs(3TP) for area constrained applications.
Journal ArticleDOI

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

Ribu Mathew, +1 more
- 07 Mar 2017 - 
TL;DR: In this article, the effect of self-heating on the thermo-electro-mechanical response of piezoresistive nano cantilever sensors as a function of the relative geome is investigated.
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Journal ArticleDOI

Label-free protein assay based on a nanomechanical cantilever array

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