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F2, H2O, and O2 etching rates of diamond and the effects of F2, HF and H2O on the molecular O2 etching of (110) diamond

C. J. Chu, +3 more
- 01 Nov 1995 - 
- Vol. 4, Iss: 12, pp 1317-1324
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TLDR
In this article, Fizeau interferometry was used to investigate the second-order kinetics of the diamond etch with respect to O 2 pressure in the pressure range 0.04-10 Torr.
About
This article is published in Diamond and Related Materials.The article was published on 1995-11-01. It has received 27 citations till now. The article focuses on the topics: Diamond & Isotropic etching.

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Citations
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Theoretical Study on X−H, −O, −OH, −NO, −ONO, and −NO2 (X = CH3, t-C4H9, C13H21)

TL;DR: Theoretical studies for conformational energies and bond energies of compounds X−H, X−O, X −O, O, O−O 2, O−NO 2, X−ONO 2, XO−NO, and XN(O)−O with X = CH3, tert-butyl, and C13H21 as mentioned in this paper.
Journal ArticleDOI

Diamond deposition from halogenated methane precursors on Si and SiC substrates

TL;DR: In this paper, it has been shown that the quality of the diamond films grow with the temperature of the hot filament and the carbon precursor gases, CF4, CCl2F2 and CCl4 as carbon precursors.
Journal ArticleDOI

Growth and Characterization of Lithium Niobate Thin Films on Diamond/Si(100) Substrates

TL;DR: In this paper, a low temperature metal-organic decomposition process for depositing LiNbO3 thin films on diamond/Si(100) substrates is reported, and X-ray diffraction studies show that the films are highly textured polycrystalline LiNabbO3 with a (012) orientation.
Journal ArticleDOI

Laser nanoablation of a diamond surface in air and vacuum

TL;DR: In this paper, the nanoablation of a diamond surface has been experimentally investigated at different ambient air pressures ranging from atmospheric to high vacuum ( 10 - 7 ǫ Torr).
References
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Book

The Properties of Diamond

Journal ArticleDOI

Mechanism of diamond growth by chemical vapor deposition on diamond (100), (111), and (110) surfaces: Carbon‐13 studies

TL;DR: In this paper, the mechanism of diamond growth by hot-filament chemical vapor deposition (CVD) was investigated on the (100, (111), and (110) crystal faces of natural diamond by competition studies using carbon-13labeled methane and carbon-12 acetylene.
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Thermal hydrogenation of diamond surfaces studied by diffuse reflectance Fourier-transform infrared, temperature-programmed desorption and laser Raman spectroscopy

TL;DR: In this article, Fourier transform infrared (FTIR) and temperature-programmed desorption (TPD) were used to study the properties of CH bonding on diamond surfaces.
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Halogenation of diamond (100) and (111) surfaces by atomic beams

TL;DR: In this paper, the diamond (100) and diamond (111) surfaces have been exposed to beams of atomic and molecular fluorine and chlorine in an ultrahigh-vacuum environment and X-ray photoelectron spectroscopy, low energy electron diffraction, and thermal desorption techniques have been used to elucidate the chemistry involved.
Journal ArticleDOI

Temperature and pressure variation of the refractive index of diamond.

TL;DR: The temperature and pressure variations of the refractive index for a Type IIa diamond have been measured at audio frequencies using capacitance techniques and the curvature in theRefractive index with temperature has been determined.
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