Highly sensitive thermal conductivity measurements of suspended membranes (SiN and diamond) using a 3ω-Völklein method
Aurélien Sikora,Hossein Ftouni,Jacques Richard,Clément Hébert,David Eon,Franck Omnès,Olivier Bourgeois +6 more
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TLDR
The method has been applied to measure thermal properties of low stress silicon nitride and polycrystalline diamond membranes with thickness ranging from 100 nm to 400 nm and support a significant grain size effect on the thermal transport.Abstract:
A suspended system for measuring the thermal properties of membranes is presented. The sensitive thermal measurement is based on the 3ω dynamic method coupled to a Volklein geometry. The device obtained using micro-machining processes allows the measurement of the in-plane thermal conductivity of a membrane with a sensitivity of less than 10 nW/K (+/−5 × 10−3 Wm−1 K−1 at room temperature) and a very high resolution (ΔK/K = 10−3). A transducer (heater/thermometer) centered on the membrane is used to create an oscillation of the heat flux and to measure the temperature oscillation at the third harmonic using a Wheatstone bridge set-up. Power as low as 0.1 nW has been measured at room temperature. The method has been applied to measure thermal properties of low stress silicon nitride and polycrystalline diamond membranes with thickness ranging from 100 nm to 400 nm. The thermal conductivity measured on the polycrystalline diamond membrane support a significant grain size effect on the thermal transport.read more
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Measuring methods for the investigation of in-plane and cross-plane thermal conductivity of thin films
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References
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Journal ArticleDOI
Enhanced thermoelectric performance of rough silicon nanowires
Allon I. Hochbaum,Renkun Chen,Raul Diaz Delgado,Wenjie Liang,Erik C. Garnett,Mark Najarian,Arun Majumdar,Arun Majumdar,Peidong Yang,Peidong Yang +9 more
TL;DR: In this article, the authors report the electrochemical synthesis of large-area, wafer-scale arrays of rough Si nanowires that are 20-300 nm in diameter.
Journal ArticleDOI
Nanoscale thermal transport
David G. Cahill,Wayne K. Ford,Kenneth E. Goodson,Gerald D. Mahan,Arun Majumdar,Humphrey J. Maris,Roberto Merlin,Simon R. Phillpot +7 more
TL;DR: A review of the literature on thermal transport in nanoscale devices can be found in this article, where the authors highlight the recent developments in experiment, theory and computation that have occurred in the past ten years and summarizes the present status of the field.
Journal Article
Enhanced Thermoelectric Performance in Rough Silicon Nanowires
Renkun Chen,Allon I. Hochbaum,Raul Diaz Delgado,Wenjie Liang,Erik C. Garnett,Mark Najarian,Arun Majumdar,Peidong Yang +7 more
TL;DR: Electrochemical synthesis of large-area, wafer-scale arrays of rough Si nanowires that are 20–300 nm in diameter show promise as high-performance, scalable thermoelectric materials.
Journal ArticleDOI
Thermal conductivity measurement from 30 to 750 K: the 3ω method
TL;DR: An ac technique for measuring the thermal conductivity of dielectric solids between 30 and 750 K is described in this article, which can be applied to bulk amorphous solids and crystals.
Journal ArticleDOI
Two-Dimensional Phonon Transport in Supported Graphene
Jae Hun Seol,Insun Jo,Arden L. Moore,Lucas Lindsay,Lucas Lindsay,Zachary H. Aitken,Michael T. Pettes,Xuesong Li,Zhen Yao,Rui Huang,David Broido,Natalio Mingo,Rodney S. Ruoff,Li Shi +13 more
TL;DR: It is shown experimentally that κ of monolayer graphene exfoliated on a silicon dioxide support is still as high as about 600 watts per meter per kelvin near room temperature, exceeding those of metals such as copper.
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