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Journal ArticleDOI

Ion beam nanoscale fabrication and lithography—A review

J.E.E. Baglin
- 15 Feb 2012 - 
- Vol. 258, Iss: 9, pp 4103-4111
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TLDR
In this article, a review discusses some of the issues that will govern future commercial adoption of ion beam nanoscale fabrication and lithography, with special reference to some major fields of application.
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This article is published in Applied Surface Science.The article was published on 2012-02-15. It has received 76 citations till now. The article focuses on the topics: Ion beam & Focused ion beam.

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Superhydrophilic (superwetting) surfaces: A review on fabrication and application

TL;DR: The ability of water to lie on a surface as a flat film rather than in form of droplets is one of the crucial surface properties which play an important role in many practical applications, including oil in water separation, water treatment, pervaporation and biomedical as discussed by the authors.
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Chemical routes to top-down nanofabrication

TL;DR: This tutorial review summarizes the various top-down nanofabrication methods, with great emphasis on the chemical routes that can generate nanoporous materials and ordered arrays of nanostructures with three-dimensional features.
Journal ArticleDOI

Printing nearly-discrete magnetic patterns using chemical disorder induced ferromagnetism.

TL;DR: The patterning of highly resolved magnetic structures is demonstrated by taking advantage of the large increase in the saturation magnetization of Fe60Al40 alloy triggered by subtle atomic displacements, which manifests a sub-50 nm patterning resolution.
Journal ArticleDOI

3D-Printed Carbon Electrodes for Neurotransmitter Detection.

TL;DR: This work is the first demonstration of 3D-printing of free-standing carbon electrodes of spherical microelectrodes with a carbon electroactive surface and the method is promising for batch fabrication of customized, implantable neural sensors.
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Vertical Growth of Superconducting Crystalline Hollow Nanowires by He+ Focused Ion Beam Induced Deposition.

TL;DR: This work reports for the first time the use of a He+ focused-ion-beam-microscope in combination with the W(CO)6 precursor to grow three-dimensional superconducting hollow nanowires as small as 32 nm in diameter and with an aspect ratio of as much as 200, paving the way for future nanoelectronic devices based on three- dimensional nanosuperconductors.
References
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Journal ArticleDOI

CASINO V2.42: a fast and easy-to-use modeling tool for scanning electron microscopy and microanalysis users.

TL;DR: The intent of this software is to assist scanning electron microscope users in interpretation of imaging and microanalysis and also with more advanced procedures including electron-beam lithography.
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Theory of ripple topography induced by ion bombardment

TL;DR: In this paper, a theory explaining the origin of ripple topography is presented, which shows that the ripple wave vector is parallel to the surface component of the beam direction, provided that longitudinal straggling of the beacon is not too large.
PatentDOI

Density multiplication and improved lithography by directed block copolymer assembly

TL;DR: In this article, a method to pattern a substrate with dense periodic nanostructures that combine top-down lithographic tools and self-assembling block copolymer materials is described.
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Nanostructure engineering by templated self-assembly of block copolymers.

TL;DR: This study investigates the formation of defects in a self-assembled array of spherical block-copolymer microdomains, using topographical templates to control the local self-assembly.
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Making waves: Kinetic processes controlling surface evolution during low energy ion sputtering

TL;DR: A review of different mechanisms that have been proposed and how they fit together in terms of the kinetic regimes in which they dominate is provided in this paper, with a comparison between theory and experiment is used to highlight strengths and weaknesses in their understanding.
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