Journal ArticleDOI
MEMS-Based Conjugate Surfaces Flexure Hinge
TLDR
In this paper, a flexure hinge for MEMS applications is presented, which combines a curved beam, as a flexible element, and a pair of conjugate surfaces, whose contact depends on load conditions.Abstract:
This paper presents a new concept flexure hinge for MEMS applications and reveals how to design, construct, and experimentally test. This hinge combines a curved beam, as a flexible element, and a pair of conjugate surfaces, whose contact depends on load conditions. The geometry is conceived in such a way that minimum stress conditions are maintained within the flexible beam. A comparison of the new design with the other kind of revolute and flexible joints is presented. Then, the static behavior of the hinge is analyzed by means of a theoretical approach, based on continuum mechanics, and the results are compared to those obtained by means of finite element analysis (FEA) simulation. A silicon hinge prototype is also presented and the construction process, based on single step lithography and reactive ion etching (RIE) technology, is discussed. Finally, a crucial in–SEM experiment is performed and the experimental results are interpreted through the theoretical models.read more
Citations
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Journal ArticleDOI
A Comprehensive Survey on Microgrippers Design: Mechanical Structure
Journal ArticleDOI
A Comprehensive Survey on Microgrippers Design: Operational Strategy
Journal ArticleDOI
Development of Micro-Grippers for Tissue and Cell Manipulation with Direct Morphological Comparison
Rossana Cecchi,Matteo Verotti,Roberto Capata,Alden Dochshanov,Giovanni B. Broggiato,Rocco Crescenzi,Marco Balucani,Stefano Natali,Giovanna Razzano,Franco Lucchese,Alvise Bagolini,Pierluigi Bellutti,Enrico Sciubba,Nicola Pio Belfiore +13 more
TL;DR: A new approach to tissue and cell manipulation is presented, which employs a conceptually new conjugate surfaces flexure hinge (CSFH) silicon MEMS-based technology micro-gripper that solves most of the above-mentioned problems.
Journal ArticleDOI
Fabrication of Novel MEMS Microgrippers by Deep Reactive Ion Etching With Metal Hard Mask
Alvise Bagolini,Sabina Ronchin,Pierluigi Bellutti,Matteo Chiste,Matteo Verotti,Nicola Pio Belfiore +5 more
TL;DR: In this paper, the fabrication of a novel class of micro grippers is demonstrated by means of bulk microelectromechanical systems (MEMS) technology using silicon on insulator wafer substrates and deep reactive ion etching.
References
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Journal ArticleDOI
Silicon as a mechanical material
TL;DR: This review describes the advantages of employing silicon as a mechanical material, the relevant mechanical characteristics of silicon, and the processing techniques which are specific to micromechanical structures.
Journal Article
Silicon as a mechanical material
TL;DR: In this article, the advantages of employing silicon as a mechanical material, the relevant mechanical characteristics of silicon, and the processing techniques which are specific to micromechanical structures are discussed.
Journal ArticleDOI
What is the Young's Modulus of Silicon?
TL;DR: In this paper, the authors present the best known elasticity data for silicon, both in depth and in a summary form, so that it may be readily accessible to MEMS designers.
Journal ArticleDOI
Critical Review: Adhesion in surface micromechanical structures
Roya Maboudian,Roger T. Howe +1 more
TL;DR: In this paper, the authors present a review on the state of knowledge of surface phenomena behind adhesion in surface micromechanical structures, including surface roughening and chemical modification of polycrystalline silicon surfaces.
Book
Compliant Mechanisms: Design of Flexure Hinges
TL;DR: The second edition of Compliant Mechanisms: Design of Flexure Hinges as mentioned in this paper provides practical answers to the design and analysis of devices that incorporate flexible hinges by means of a bottom-up compliance (flexibility) approach.