Journal ArticleDOI
Microstructure of ultrananocrystalline diamond films grown by microwave Ar–CH4 plasma chemical vapor deposition with or without added H2
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TLDR
In this paper, the authors show that hydrogen plays a critical role in determining the nucleation interface between the diameters of unicoronocrystalline diamond (UNCD) films.Abstract:
Ultrananocrystalline diamond (UNCD) films, grown using microwave plasma-enhanced chemical vapor deposition with gas mixtures of Ar–1%CH4 or Ar–1%CH4–5%H2, have been examined with transmission electron microscopy (TEM). The films consist of equiaxed nanograins (2–10 nm in diameter) and elongated twinned dendritic grains. The area occupied by dendritic grains increases with the addition of H2. High resolution electron microscopy shows no evidence of an amorphous phase at grain boundaries, which are typically one or two atomic layer thick (0.2–0.4 nm). Cross-section TEM reveals a noncolumnar structure of the films. The initial nucleation of diamond occurs directly on the Si substrate when H2 is present in the plasma. For the case of UNCD growth from a plasma without addition of H2, the initial nucleation occurs on an amorphous carbon layer about 10–15 nm thick directly grown on the Si substrate. This result indicates that hydrogen plays a critical role in determining the nucleation interface between the UNCD...read more
Citations
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Laser ablation in liquids : Applications in the synthesis of nanocrystals
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Nanocrystalline materials and coatings
Sie Chin Tjong,Haydn Chen +1 more
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The CVD of Nanodiamond Materials
TL;DR: The growth and characteristics of nanocrystalline diamond thin films with thicknesses from 20nm to less than 5nm are reviewed in this paper, where it is convenient to classify these films as either ultra-nanocalstalline-diamond (UNCD) or nanocrystine-Diamond (NCD) based on their microstructure, properties, and growth environment.
Journal ArticleDOI
Growth, electronic properties and applications of nanodiamond
Oliver A. Williams,Oliver A. Williams,Milos Nesladek,Milos Nesladek,Michael Daenen,Sh. Michaelson,Alon Hoffman,Eiji Osawa,Ken Haenen,Ken Haenen,Richard B. Jackman +10 more
TL;DR: In this paper, it is shown that nanocrystalline diamond (NCD) consists of facets less than 100 nm in size, whereas a second term "ultrananocrystine diamond" (UNCD) has been coined to describe material with grain sizes less than 10 nm.
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Elastic, mechanical, and thermal properties of nanocrystalline diamond films
J. Philip,Peter Hess,Tatyana Feygelson,James E. Butler,S. Chattopadhyay,Kuei-Hsien Chen,Li-Chyong Chen +6 more
TL;DR: In this article, columnar-structured diamond films with column diameters less than 100 nm and thickness in the range of 1-5 μm were grown on silicon substrates by chemical vapor deposition (CVD) in a microwave plasma reactor with purified methane and hydrogen used as the reactants.
References
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Journal ArticleDOI
Nanocrystalline diamond films1
TL;DR: In this paper, the synthesis of nanocrystalline diamond films from carbon-containing noble gas plasmas is described, which is the result of new growth and nucleation mechanisms, which involve the insertion of C2, carbon dimer, into carbon-carbon and carbon-hydrogen bonds, resulting in hetereogeneous nucleation rates on the order 1010 cm−2 s−1.
Journal ArticleDOI
Generation of diamond nuclei by electric field in plasma chemical vapor deposition
TL;DR: In this paper, a predeposition process of several minutes duration was introduced in which a high methane fraction in the feed gas was used and in which negative bias voltage was applied to the substrate.
Journal ArticleDOI
Fullerenes as precursors for diamond film growth without hydrogen or oxygen additions
TL;DR: In this article, the growth of diamond films using fullerene precursors in an argon microwave plasma was reported, a unique development achieved without the addition of hydrogen or oxygen, and it was speculated that collisional fragmentation of C60 to give C2 could be responsible for the high growth rate of the very fine-grained diamond films.
Journal ArticleDOI
Control of diamond film microstructure by Ar additions to CH4/H2 microwave plasmas
TL;DR: The transition from microcrystalline to nanocrystalline diamond films grown from Ar/H2/CH4 microwave plasmas has been investigated in this article, showing that the surface morphology, the grain size, and the growth mechanism of the diamond films depend strongly on the ratio of Ar to H2 in the reactant gases.
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