Open AccessBook
Scanning Electron Microscopy: Physics of Image Formation and Microanalysis
TLDR
In this article, the authors describe the physics of a scanning electron microscope, including: Electron Optics of a Scanning Electron Microscope., Electron Scattering and Diffusion, Emission of Backscattered and Secondary Electrons, Electron Detectors and Spectrometers, Image Contrast and Signal Processing, and Electron-Beam Induced Current and Cathodoluminescence.Abstract:
Electron Optics of a Scanning Electron Microscope.- Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.read more
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Gas-assisted focused electron beam and ion beam processing and fabrication
TL;DR: A review of the state of the art and level of understanding of direct ion and electron beam fabrication and point out some of the unsolved problems can be found in this article, where the authors also discuss structures that are made for research purposes or for demonstration of the processing capabilities.
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Theory and application of electron channelling contrast imaging under controlled diffraction conditions
S. Zaefferer,Nahid Nora Elhami +1 more
TL;DR: In this paper, the authors present a simple, yet instructive and demonstrative treatment of the theory of ECC of lattice defects based on Bloch wave theory using a two-beam approach.
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Transmission EBSD from 10 nm domains in a scanning electron microscope
Robert R. Keller,Roy H. Geiss +1 more
TL;DR: In this article, a new form of low-energy transmission Kikuchi diffraction, performed in the SEM Transmission EBSD (t-EBSD) detector and software, has been proposed to capture and analyse the angular intensity variation in large-angle forward scattering of electrons in transmission.
Patent
Single Molecule Arrays for Genetic and Chemical Analysis
TL;DR: In this article, random arrays of single molecules are provided for carrying out large scale analyses, particularly of biomolecules, such as genomic DNA, cDNAs, proteins, and the like.
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Phase contrast STEM for thin samples: Integrated differential phase contrast.
TL;DR: The theory is validated with simulations and the first experimental results of the iDPC-STEM technique are presented showing its capability for imaging both light and heavy elements with atomic resolution and a good signal to noise ratio (SNR).