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Journal ArticleDOI

Surface Studies of Solids by Total Reflection of X-Rays

Lyman G. Parratt
- 15 Jul 1954 - 
- Vol. 95, Iss: 2, pp 359-369
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TLDR
In this paper, the shape of the curve of reflected x-ray intensity vs glancing angle in the region of total reflection was analyzed to study certain structural properties of the mirror surface about 10 to several hundred angstroms deep.
Abstract
Analysis of the shape of the curve of reflected x-ray intensity vs glancing angle in the region of total reflection provides a new method of studying certain structural properties of the mirror surface about 10 to several hundred angstroms deep. Dispersion theory, extended to treat any (small) number of stratified homogeneous media, is used as a basis of interpretation.Curves for evaporated copper on glass at room temperature are studied as an example. These curves may be explained by assuming that the copper (exposed to atmospheric air at room temperature) has completely oxidized about 150A deep. If oxidation is less deep, there probably exists some general reduction of density (e.g., porosity) and an electron density minimum just below an internal oxide seal. This seal, about 25A below the nominal surface plane, arrests further oxidation of more deeply-lying loose-packed copper crystallites.All measurements to date have been carried out under laboratory atmospheric conditions which do not allow satisfactory separation or control of the physical and chemical variables involved in the surface peculiarities. The method, under more controlled conditions of preparation and treatment of the surface, promises to be useful.

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Influence of a water rinse on the structure and properties of poly(3,4-ethylene dioxythiophene):poly(styrene sulfonate) films.

TL;DR: The removal of PSS may benefit organic light emitting diode fabrication by reducing acid attack on indium tin oxide electrodes and lead to more robust performance in switching circuits by extending the working frequency range.
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Structural characterization of porous low-k thin films prepared by different techniques using x-ray porosimetry

TL;DR: In this article, three different types of porous low-k dielectric films, with similar dielectrics constants, are characterized using x-ray porosimetry (XRP).
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Effect of metal ions on monolayer collapses.

TL;DR: Electron density profiles obtained from X-ray reflectivity analysis show that a three-molecular-layer structure starts to form just after constant area collapse, where only bimolecular layers form after constant pressure collapse, with the lower and upper layers having molecules in asymmetric and symmetric configurations, respectively.
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Epitaxial silicon and germanium on buried insulator heterostructures and devices

TL;DR: In this paper, a method based upon molecular beam epitaxy and solid-phase epitaxy is described to make two-dimensional, single crystal films of silicon or germanium on top of this oxide.
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Density and structural changes in SiC after amorphization and annealing

TL;DR: In this paper, the density of amorphous SiC layers formed by 2 MeV Si+ implantation into single-crystalline 6H-SiC was measured by x-ray reflectometry and compared with the results of step height measurements.
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