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Journal ArticleDOI

Surface Studies of Solids by Total Reflection of X-Rays

Lyman G. Parratt
- 15 Jul 1954 - 
- Vol. 95, Iss: 2, pp 359-369
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TLDR
In this paper, the shape of the curve of reflected x-ray intensity vs glancing angle in the region of total reflection was analyzed to study certain structural properties of the mirror surface about 10 to several hundred angstroms deep.
Abstract
Analysis of the shape of the curve of reflected x-ray intensity vs glancing angle in the region of total reflection provides a new method of studying certain structural properties of the mirror surface about 10 to several hundred angstroms deep. Dispersion theory, extended to treat any (small) number of stratified homogeneous media, is used as a basis of interpretation.Curves for evaporated copper on glass at room temperature are studied as an example. These curves may be explained by assuming that the copper (exposed to atmospheric air at room temperature) has completely oxidized about 150A deep. If oxidation is less deep, there probably exists some general reduction of density (e.g., porosity) and an electron density minimum just below an internal oxide seal. This seal, about 25A below the nominal surface plane, arrests further oxidation of more deeply-lying loose-packed copper crystallites.All measurements to date have been carried out under laboratory atmospheric conditions which do not allow satisfactory separation or control of the physical and chemical variables involved in the surface peculiarities. The method, under more controlled conditions of preparation and treatment of the surface, promises to be useful.

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Microscratch testing method for systematic evaluation of the adhesion of atomic layer deposited thin films on silicon

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Patent

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