Journal ArticleDOI
Surface-tension-driven microactuation based on continuous electrowetting
Junghoon Lee,Chang-Jin Kim +1 more
TLDR
In this article, a liquid-metal droplet can be driven in an electrolyte-filled capillary by locally modifying the surface tension with electric potential, and a liquid micromotor is demonstrated at a speed of /spl sim/40 mm/s (or 420 r/min along a 2-mm loop).Abstract:
This paper describes the first microelectromechanical systems (MEMS) demonstration device that adopts surface tension as the driving force. A liquid-metal droplet can be driven in an electrolyte-filled capillary by locally modifying the surface tension with electric potential. We explore this so-called continuous electrowetting phenomenon for MEMS and present crucial design and fabrication technology that reduce the surface-tension-driving principle, inherently powerful in microscale, into practice. The key issues that are identified and investigated include the problem of material compatibility, electrode polarization, and electrolysis, as well as the micromachining process. Based on the results from the initial test devices and the design concept for a long-range movement of the liquid-metal droplet, we demonstrate a liquid micromotor, an electrolyte and liquid-metal droplets rotating along a microchannel loop. Smooth and wear-free rotation of the liquid system is shown at a speed of /spl sim/40 mm/s (or 420 r/min along a 2-mm loop) with a driving voltage of only 2.8 V and little power consumption (10-100 /spl mu/W).read more
Citations
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Journal ArticleDOI
Microfluidics: Fluid physics at the nanoliter scale
Todd M. Squires,Stephen R. Quake +1 more
TL;DR: A review of the physics of small volumes (nanoliters) of fluids is presented, as parametrized by a series of dimensionless numbers expressing the relative importance of various physical phenomena as mentioned in this paper.
Journal ArticleDOI
Electrowetting: from basics to applications
TL;DR: In this paper, the authors compare the various approaches used to derive the basic electrowetting equation, which has been shown to be very reliable as long as the applied voltage is not too high.
Journal ArticleDOI
A review of micropumps
Daniel J. Laser,Juan G. Santiago +1 more
TL;DR: In this article, the authors survey progress over the past 25 years in the development of microscale devices for pumping fluids and attempt to provide both a reference for micropump researchers and a resource for those outside the field who wish to identify the best micropumps for a particular application.
Journal ArticleDOI
Physics and applications of microfluidics in biology.
TL;DR: The focus of this review is microscale phenomena and the use of the physics of the scale to create devices and systems that provide functionality useful to the life sciences.
Journal ArticleDOI
Microfluidic lab-on-a-chip platforms: requirements, characteristics and applications
TL;DR: This critical review summarizes developments in microfluidic platforms that enable the miniaturization, integration, automation and parallelization of (bio-)chemical assays and attempts to provide a selection scheme based on key requirements of different applications and market segments.
References
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TL;DR: In this paper, the authors discuss the nature and properties of liquid interfaces, including the formation of a new phase, nucleation and crystal growth, and the contact angle of surfaces of solids.
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Principles of colloid and surface chemistry
Paul C. Hiemenz,Raj Rajagopalan +1 more
TL;DR: Colloid and surface chemistry - scope and variables sedimentation and diffusion and their equilibrium solution thermodynamics - osmotic and Donnan equilibria the rheology of dispersions static and dynamic light scattering and other radiation scattering surface tension and contact angle - application to pure substances adsorption from solution and monolayer formation colloidal structures in surfactant solutions - association colloids adsorction at gas-solid interfaces van der Waals forces the electrical double layer and double-layer interactions electrophoresis and other electrokinetic phenomena electrostatic and polymer-induced
Journal ArticleDOI
Critical Review: Adhesion in surface micromechanical structures
Roya Maboudian,Roger T. Howe +1 more
TL;DR: In this paper, the authors present a review on the state of knowledge of surface phenomena behind adhesion in surface micromechanical structures, including surface roughening and chemical modification of polycrystalline silicon surfaces.
Journal ArticleDOI
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS
TL;DR: The IBM SU-8 resist as discussed by the authors is an epoxy-based resist designed specifically for ultrathick, high-aspect-ratio MEMS-type applications and it has been shown that with single-layer coatings, thicknesses of more than 500 μm can be achieved reproducibly.